Patents by Inventor Sang Hwi Ham

Sang Hwi Ham has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12080586
    Abstract: A substrate transfer robot for transferring a substrate in a vacuum chamber, includes: a transfer arm platform having coupling holes, each compartmentalized into a lower and an upper space, wherein a link connecting member with blades is engaged at a front area of the transfer arm platform and a support shaft of a lower support is inserted into the lower space of one of the coupling holes; and a first and a second transfer arm part each including an end effector for supporting the substrate, multiple transfer link arms and subordinate link arms, and a common link arm that are connected to each other or to the transfer arm platform, wherein, for each transfer arm part, drive shafts, interlocked with transfer driving motors or speed reducers installed on one of the transfer link arms, and output shafts interlocked with the drive shafts are installed on the transfer link arms.
    Type: Grant
    Filed: April 18, 2022
    Date of Patent: September 3, 2024
    Assignee: T-Robotics Co., Ltd.
    Inventors: Soo Jong Lee, Myung Jin Kim, Chang Seong Lee, Seung Young Baek, Chang Hyun Jee, Sang Hwi Ham, Moon Gi Hur, Jae Hyun Park, Tae Han Lee
  • Patent number: 11820005
    Abstract: A substrate transfer robot for transferring a substrate in a vacuum chamber, includes: a transfer arm platform having coupling holes, wherein a link connecting member with blades is engaged at a front area of the transfer arm platform and a support shaft of a lower support is inserted into the lower space of one of the coupling holes; and a first and a second transfer arm part each including an end effector for supporting the substrate, multiple transfer link arms and subordinate link arms, and a common link arm that are connected to each other or to the transfer arm platform, wherein, the transfer link arms include at least some of drive shafts, interlocked with transfer driving motors or speed reducers, and output shafts interlocked with the drive shafts, and wherein the end effectors are positioned at different heights from each other through using a bracket.
    Type: Grant
    Filed: April 18, 2022
    Date of Patent: November 21, 2023
    Assignee: T-Robotics Co., Ltd.
    Inventors: Soo Jong Lee, Myung Jin Kim, Chang Seong Lee, Seung Young Baek, Chang Hyun Jee, Sang Hwi Ham, Moon Gi Hur, Jae Hyun Park, Tae Han Lee
  • Publication number: 20220410944
    Abstract: A travel robot for moving a substrate transfer robot in a vacuum chamber, includes: a travel arm platform through which coupling holes are formed, wherein an elevating drive shaft is inserted into a lower space of one of the coupling holes; a first travel arm part including a (1_1)-st and a (1_2)-nd travel link arms; a second travel arm part including a (2_1)-st and a (2_2)-nd travel link arms, wherein travel driving motors and speed reducers are installed in the (1_1)-st and the (2_1)-st travel link arms; and a transfer robot coupling part engaged with the (1_2)-nd and the (2_2)-nd travel link arms, wherein a rotation driving motor built thereon is engaged with the substrate transfer robot by a rotation drive shaft.
    Type: Application
    Filed: April 18, 2022
    Publication date: December 29, 2022
    Inventors: Soo Jong Lee, Myung Jin Kim, Chang Seong Lee, Seung Young Baek, Chang Hyun Jee, Sang Hwi Ham, Moon Gi Hur, Jae Hyun Park, Tae Han Lee
  • Publication number: 20220410413
    Abstract: A substrate transfer robot for transferring a substrate in a vacuum chamber, includes: a transfer arm platform having coupling holes, wherein a link connecting member with blades is engaged at a front area of the transfer arm platform and a support shaft of a lower support is inserted into the lower space of one of the coupling holes; and a first and a second transfer arm part each including an end effector for supporting the substrate, multiple transfer link arms and subordinate link arms, and a common link arm that are connected to each other or to the transfer arm platform, wherein, the transfer link arms include at least some of drive shafts, interlocked with transfer driving motors or speed reducers, and output shafts interlocked with the drive shafts, and wherein the end effectors are positioned at different heights from each other through using a bracket.
    Type: Application
    Filed: April 18, 2022
    Publication date: December 29, 2022
    Inventors: Soo Jong Lee, Myung Jin Kim, Chang Seong Lee, Seung Young Baek, Chang Hyun Jee, Sang Hwi Ham, Moon Gi Hur, Jae Hyun Park, Tae Han Lee
  • Publication number: 20220384240
    Abstract: A substrate transfer robot for transferring a substrate in a vacuum chamber, includes: a transfer arm platform having coupling holes, each compartmentalized into a lower and an upper space, wherein a link connecting member with blades is engaged at a front area of the transfer arm platform and a support shaft of a lower support is inserted into the lower space of one of the coupling holes; and a first and a second transfer arm part each including an end effector for supporting the substrate, multiple transfer link arms and subordinate link arms, and a common link arm that are connected to each other or to the transfer arm platform, wherein, for each transfer arm part, drive shafts, interlocked with transfer driving motors or speed reducers installed on one of the transfer link arms, and output shafts interlocked with the drive shafts are installed on the transfer link arms.
    Type: Application
    Filed: April 18, 2022
    Publication date: December 1, 2022
    Inventors: Soo Jong Lee, Myung Jin KIM, Chang Seong Lee, Seung Young Baek, Chang Hyun Jee, Sang Hwi Ham, Moon Gi Hur, Jae Hyun Park, Tae Han Lee
  • Publication number: 20220380145
    Abstract: A travel robot for moving a substrate transfer robot in a vacuum chamber, includes: an elevating part located in a lower outer region of a housing, sealing the vacuum chamber, wherein an elevating drive shaft moves through a vacuum chamber through-hole; a travel arm platform through which coupling holes are formed, wherein the elevating drive shaft is inserted into a lower space of one of the coupling holes; a first travel arm part including a (1_1)-st and a (1_2)-nd travel link arms; a second travel arm part including a (2_1)-st and a (2_2)-nd travel link arms, wherein travel driving motors and speed reducers are installed in the (1_1)-st and the (2_1)-st travel link arms; and a transfer robot coupling part engaged with the (1_2)-nd and the (2_2)-nd travel link arms, wherein a rotation driving motor built thereon is engaged with the substrate transfer robot by a rotation drive shaft.
    Type: Application
    Filed: April 18, 2022
    Publication date: December 1, 2022
    Inventors: Soo Jong Lee, Myung Jin Kim, Chang Seong Lee, Seung Young Baek, Chang Hyun Jee, Sang Hwi Ham, Moon Gi Hur, Jae Hyun Park, Tae Han Lee