Abstract: A supply control system for a tank utilized in a semiconductor manufacturing process is disclosed.

Abstract: A liquid chemical supply device, system and method capable of processing a gas having first and second canisters connected, respectively, to semiconductor manufacturing apparatus by way of first and second supply lines, to provide liquid chemicals stored therein to the semiconductor manufacturing apparatus; first and second push lines connected to the first and second canisters, respectively, and configured to provide a push gas to the first and second canisters to discharge the chemicals into the first and second supply lines, and a gas processing unit in fluid communication with the first supply line and the second push line, in order for the chemical in the first supply line containing a gas therein to be provided to and stored in the second canister through the second push line.