Patents by Inventor Sang Koo JANG

Sang Koo JANG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE SUPPORTING APPARATUS AND MANUFACTURING METHOD THEREOF
    Publication number: 20190226085
    Abstract: Provided is a substrate supporting apparatus including: a mounting part provided with a first body brought into contact with a substrate so that the substrate is mounted thereon and a second body configured to surround the first body; and a support part connected under the mounting part so as to support the mounting part, wherein the first body and the second body include a plurality of protrusions, and an area of upper surfaces of the protrusions provided on the first body is formed larger than an area of upper surfaces of the protrusions provided on the second body, and thus, the substrate can be stably supported.
    Type: Application
    Filed: January 4, 2019
    Publication date: July 25, 2019
    Inventors: Suk Chae JANG, Chan OH, Sung Ho PARK, Sung Woon JUNG, Sang Koo JANG, Il KIM