Abstract: A method for manufacturing a graphene thin film for a pellicle material using ozone gas includes a graphene forming step of forming graphene on an upper surface of a substrate, an ozone treatment step of exposing the graphene layer formed in the graphene forming step to ozone, and an etching step of heat-treating and etching the ozone-treated graphene layer.

Abstract: Provided are high titer Japanese encephalitis virus genotype 5 and uses thereof, specifically a high titer virus produced using subculture and mouse cerebral inoculation method and a vaccine composition comprising the same.

Abstract: A method for manufacturing the pellicle includes the steps of forming upper and lower silicon nitride layers on opposite surfaces of a wafer substrate, forming a metal layer on the lower silicon nitride layer, etching the upper silicon nitride layer to a preset thickness after the forming of the metal layer, etching and removing the metal layer after the etching of the upper silicon nitride layer, forming a graphene thin film on the upper silicon nitride layer, forming a pattern on the lower silicon nitride layer, etching the lower silicon nitride layer according to the formed pattern, and etching the wafer substrate along the lower silicon nitride layer etched according to the pattern.

Abstract: Provided is a substrate processing apparatus. The substrate processing apparatus includes a chamber in which a process with respect to a substrate is performed, a susceptor which is installed in the chamber and on which the substrate is placed, a plurality of lift pins passing through the susceptor to support the substrate, and a plurality of protection plugs protruding from a bottom surface of the susceptor to surround a portion of each of the lift pins protruding from the bottom surface of the susceptor.

Abstract: A solar panel disassembling apparatus according to an embodiment of the present disclosure separates a glass plate of a solar panel and a film layer bonded to the glass plate from each other. The solar panel disassembling apparatus includes a supply module that stands and fixes the solar panel such that a bond line between the glass plate and the film layer is exposed upward and downward and that moves the solar panel in a parallel direction parallel to a bonding surface between the glass plate and the film layer, and a wire-shaped cutting blade that is disposed in front of the solar panel in a movement direction of the solar panel to have a distance from the supply module, is disposed in parallel to the bonding surface, and separates the glass plate and the film layer from each other.

Abstract: A vehicle-to-everything (V2X) communication-based electronic toll collection system (ETCS) according to an embodiment of the present invention includes at least one roadside unit (RSU), a token issuer checking a de-identified token of a vehicle by communicating with an on-board unit (OBU) of the vehicle via the at least one roadside unit, and a clearing house communicating with the token issuer and charging a toll to a driver/owner of the vehicle. The token issuer generates toll information of the vehicle based on the de-identified token of the vehicle and location information of the at least one roadside unit involved in checking the de-identified token.

Abstract: A method for manufacturing a carbon-based thin film shadow mask includes the steps of a) forming a buffer layer on a substrate, b) depositing a metal layer on the buffer layer and then patterning the metal layer, c) forming an amorphous carbon layer on the patterned metal layer, d) forming a crystalline carbon layer on the buffer layer by switching the metal layer and the amorphous carbon layer, e) removing the amorphous carbon layer exposed to the outside, f) removing the metal layer, and g) separating the buffer layer and the crystalline carbon layer.

Abstract: A method for manufacturing a fine metal mask includes the steps of a) patterning a plated resist on a substrate, b) forming a metal plated layer on the substrate exposed through the patterned plated resist, c) removing the patterned plated resist after step b), and d) separating the metal plated layer and the substrate. In step a), a cross-section of the plated resist is formed into a trapezoidal shape.

Abstract: Disclosed is a manufacturing method of a semiconductor device. The manufacturing method may include: a closing operation of seating a substrate on a support member provided in a chamber, and closing the chamber to seal a treating space provided by the chamber; a clamping operation of clamping the chamber by moving a clamping body in a direction facing the chamber after the closing operation; a close-contact operation of making the chamber be in contact with the clamping body after the clamping operation; and a substrate processing operation of drying the substrate by supplying supercritical fluid into the treating space.

Abstract: The present embodiment relates to a technology for driving a display device, and provides a technology in which a pixel driving device determines whether or not an overcurrent flows through a driving voltage line, and, if it is determined that an overcurrent flows therethrough, controls pixel data or an analog voltage output to a pixel so as to reduce a driving current.

Abstract: An apparatus for forward collision avoidance assist-junction turning of a vehicle includes a sensor for acquiring at least one of a steering angle, a steering angle speed, or a yaw rate of a vehicle, or a size, a position, or a speed of an opposite target. A traveling path area for a left-turn or a right-turn is calculated by a controller based on the steering angle or the yaw rate of the vehicle. The traveling path area is then corrected by the controller based on at least a portion of the steering angle, the steering angle speed, or the yaw rate of the vehicle, or the size, the position, and the speed of the opposite target. A warning against the collision between the vehicle and the opposite target and a control operation to prevent the collision are performed based on the corrected traveling path area.

Abstract: Disclosed is an autonomous driving control apparatus. The autonomous driving control apparatus includes a sensor device, a memory, and a control device. For example, the autonomous driving control apparatus identifies an autonomous driving control level of a host vehicle, identifies a first autonomous driving control method corresponding to at least one level higher than or equal to the specified level when the autonomous driving control level is higher than or equal to a specified level, identifies a surrounding object of the host vehicle by using the sensor device while the host vehicle is driving, and performs a first autonomous driving control corresponding to the surrounding object based on the first autonomous driving control method.

Abstract: A delivery robot includes: an inner box provided with a receiving space whose upper part is opened; a hinge bracket fixed to one side of the inner box; an actuator placed on one side of the inner box and configured to lift the rod up and down; a rail arranged vertically outside the inner box; a cover assembly partially connected to the rod, installed on the hinge bracket, and configured to rotate around a first axis according to a lifting operation of the rod to open an upper part of the inner box; a tray placed in a receiving space of the inner box; a lift wheel unit fixed to the tray and configured to move up and down along the rail; a first link installed on the lift wheel unit to rotate around the second axis; and a second link whose one side is connected to the first link to rotate around a third axis and whose other side is connected to the cover assembly to rotate around a fourth axis.

Abstract: The present disclosure relates to a device and a method for avoiding an obstacle. The device includes a sensor that detects an object outside a vehicle, a processor, and memory storing instructions. The device determines whether the object belongs to any pre-classified type, determines a reliability value associated with information on the object based on the object not belonging to any pre-classified type, and controls, based on the reliability value being greater than a threshold reliability value, the driving controller to avoid the object.

Abstract: Provided is a multiple positioning method and apparatus including a node setting part for setting at least three anchor nodes whose positions are known to at least one unknown node whose position is to be obtained; an information acquisition part for acquiring distance information between each of unknown nodes and each of anchor nodes, distance information between unknown nodes and coordinate information of each of anchor nodes; and a coordinate calculation part for calculating coordinates of each of the unknown nodes based on the distance information between each of the unknown nodes and each of the anchor nodes, the distance information between the unknown nodes and the coordinate information of each of the anchor nodes.

Abstract: Embodiments of a substrate processing apparatus and substrate processing method are provided. Embodiments include a laser that directs a laser beam toward a substrate. Embodiments further include a chuck spaced apart in a first direction from the laser. Embodiments include a lower particle blocker disposed between the chuck and the laser. In some cases, the lower particle blocker includes a first particle blocker. In some cases, the first particle blocker includes a first slit that penetrates the first particle blocker in the first direction. In some cases, the first slit extends in a second direction perpendicular to the first direction.

Abstract: An apparatus for controlling autonomous driving of a host vehicle is introduced. The apparatus may comprise a processor, and memory storing instructions, when executed by the processor, may cause the apparatus to receive sensor information from at least one of a plurality of sensors mounted on the host vehicle, determine, based on the sensor information, whether another vehicle, traveling within a threshold distance from the host vehicle, satisfies a target condition, based on the other vehicle satisfying the target condition, set the other vehicle as a target vehicle, determine an avoidance condition between the target vehicle and the host vehicle, and control, based on the avoidance condition, the autonomous driving of the host vehicle to operate in a first avoidance mode or in a second avoidance mode.

Abstract: Disclosed herein are an apparatus and method for processing fast persistent writing to nonvolatile memory. A method for processing fast persistent writing to a nonvolatile memory includes writing log data from a last storage position in a data block created in a certain size, reflecting the entire data block in a storage medium, increasing the last storage position by a size of the written log data, and reflecting the entire data block in a storage medium, wherein the data block is linearly linked to an additional data block in a creation order, and wherein the data block includes a log data storage region, information about a last storage position where the log data is stored in the log data storage region, and information about a linked next data block.

Abstract: The present disclosure relates to an anti-CD20 asymmetric antibody including a single-chain variable fragment (scFv) on one side and an antigen-binding fragment (Fab) on the other side. Compared to an antibody having a symmetric structure, the asymmetric antibody of the present disclosure effectively activates complements and exhibits significantly improved complement-dependent cytotoxicity (CDC), and thus can be advantageously used as an effective therapeutic agent or therapeutic adjuvant for treating cancer.

Abstract: A substrate processing apparatus includes a process chamber including a first body and a second body that are coupled to each other to form a processing space therein, a clamping member configured to clamp the first body and the second body, and an anti-friction member mounted in a groove formed in a contact region between the first body or the second body and the clamping member.