Abstract: A display device includes a cover part, a driving unit for transmitting an external force to the human body through the cover part, and a display unit that is provided at a position of the cover part through which the external force is transmitted to the human body, and indicates a display in accordance with the external force transmitted from the driving unit.

Abstract: A body lifting device for a bed is provided with a support unit, having a predetermined height, connected to a fixing part of a bed. A movable bed part adjusts an angle between the fixing and movable parts. A driving force transfer member of the device is connected to the movable part at one end, the other end extending toward the fixing part, and has a support point therebetween supported by the support unit. A length between the support point and the other end varies depending on an angle adjustment of the movable part. A lifting unit of the device supports a portion of a user's body, and is connected to the other end of the driving force transfer member. The lifting unit selectively lifts up the user's body depending on movement of the driving force transfer member, which is caused by adjusting an angle of the movable part.

Abstract: A body lifting device for a bed is provided with a support unit, having a predetermined height, connected to a fixing part of a bed. A movable bed part adjusts an angle between the fixing and movable parts. A driving force transfer member of the device is connected to the movable part at one end, the other end extending toward the fixing part, and has a support point therebetween supported by the support unit. A length between the support point and the other end varies depending on an angle adjustment of the movable part. A lifting unit of the device supports a portion of a user's body, and is connected to the other end of the driving force transfer member. The lifting unit selectively lifts up the user's body depending on movement of the driving force transfer member, which is caused by adjusting an angle of the movable part.

Abstract: The present invention relates to a display device that includes a cover part; a driving unit for transmitting an external force to the human body through the cover part; and a display unit that is provided in contact with the cover part, and indicates a display in accordance with the external force transmitted from the driving unit.

Abstract: Disclosed are PEALD (plasma-enhanced atomic layer deposition) apparatus and PEALD method for manufacturing a semiconductor device, the PEALD apparatus comprising: a housing including a reaction chamber in which a deposition reaction is performed; a rotary disk unit installed in the housing and provided with a plurality of susceptors for receiving wafers thereon so as to move the wafers; a gas spray unit mounted on the upper end of the housing above the rotary disk unit, and provided with first reactive gas sprayers, second reactive gas sprayers and inert gas sprayers on a lower surface of a circular disk for spraying respective gases into the housing; a gas feed unit connected to the gas spray unit for supplying first and second reactive gases and a purge gas into the housing; a gas exhaust port formed around the rotary disk unit; and a plasma generator for generating plasma to excite the second reactive gas.

Abstract: The present invention relates to a method for forming silicon oxide films on substrates using an atomic layer deposition process. Specifically, the silicon oxide films are formed at low temperature and high deposition rate via the atomic layer deposition process using a Si2Cl6 source unlike a conventional atomic layer deposition process using a SiCl4 source. The atomic layer deposition apparatus used in the above process can be in-situ cleaned effectively at low temperature using a HF gas or a mixture gas of HF gas and gas containing —OH group.