Patents by Inventor Sang-Su YEH

Sang-Su YEH has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • CONTROL METHOD OF EXPOSURE APPARATUS AND CONTROL APPARATUS OF EXPOSURE APPARATUS
    Publication number: 20190113847
    Abstract: In a method of controlling an exposure apparatus, a plurality of spot beams is irradiated from an optical system onto a reference surface. Focal positions of at least some spot beams of the plurality of spot beams on Z axis perpendicular to the reference surface are obtained. A focal plane of the at least some spot beams is calculated from the focal positions. An angle of the optical system relative to the reference surface is aligned based on an angle error between the focal plane and the reference surface.
    Type: Application
    Filed: July 6, 2018
    Publication date: April 18, 2019
    Inventors: Sung-Min AHN, Ja-Yul KIM, Sang-Ha PARK, Sang-Hyun PARK, Sang-Su YEH