Patents by Inventor Sang-Whan Cha

Sang-Whan Cha has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Proximity type exposure apparatus
    Patent number: 7692770
    Abstract: An apparatus and method for aligning a substrate and a mask are discussed. In one aspect of the present invention, the apparatus includes a mask stage, wherein the mask stage includes a mask fixing stage configured to fixedly support a mask; a base stage supporting the mask fixing stage; and at least one guide unit disposed in the base stage, coupled to the mask fixing stage, and configured to move the mask fixing stage, so as to move the mask in a predetermined direction.
    Type: Grant
    Filed: December 29, 2005
    Date of Patent: April 6, 2010
    Assignee: LG Display Co., Ltd.
    Inventors: Cheon-Soo Lee, Sang-Whan Cha, Hyun-Jang Shin
  • Proximity type exposure apparatus
    Publication number: 20060209288
    Abstract: An apparatus and method for aligning a substrate and a mask are discussed. In one aspect of the present invention, the apparatus includes a mask stage, wherein the mask stage includes a mask fixing stage configured to fixedly support a mask; a base stage supporting the mask fixing stage; and at least one guide unit disposed in the base stage, coupled to the mask fixing stage, and configured to move the mask fixing stage, so as to move the mask in a predetermined direction.
    Type: Application
    Filed: December 29, 2005
    Publication date: September 21, 2006
    Inventors: Cheon-Soo Lee, Sang-Whan Cha, Hyun-Jang Shin