Abstract: Provided are a chemical liquid supply apparatus and a semiconductor processing apparatus. The chemical liquid supply apparatus, which supplies a chemical liquid to a process chamber during a semiconductor manufacturing process, may include a chemical liquid supply pipe in which the chemical liquid flows therein and of which a spray end, through which the chemical liquid is sprayed, extends into the process chamber, an external electrode disposed outside the chemical liquid supply pipe, and a power supply module configured to apply power to the external electrode.

Abstract: A sensor module for detecting a process environment in semiconductor equipment includes: a sensor body including a first plate and a second plate; and a sensor circuit unit in the sensor body, wherein the sensor circuit unit includes a static electricity sensor between the first plate and the second plate.

Abstract: A designed waveform generator includes at least one first signal generator including a first switching device and generating a square wave having a constant voltage level during an on-period of the first switching device and at least one second signal generator including a second switching device and controlling a transition period of the second switching device to generate a variable waveform having a variable voltage level during the transition period of the second switching device. The at least one first signal generator and the at least one second signal generator are connected to each other in a cascade manner.

Abstract: A method of diagnosing an abnormal state of a substrate-processing apparatus includes measuring a temperature of a chuck in the substrate-processing apparatus. The temperature of the chuck is compared to a target temperature of the chuck, with a temperature-controlling unit. A control signal is analyzed to diagnose an abnormal state of the substrate-processing apparatus. The control signal is transmitted from the temperature-controlling unit to a drive parameter-applying unit configured to provide the chuck with a drive parameter.

Abstract: A sensor module for detecting a process environment in semiconductor equipment includes: a sensor body including a first plate and a second plate; and a sensor circuit unit in the sensor body, wherein the sensor circuit unit comprises a static electricity sensor between the first plate and the second plate.

Abstract: A method of diagnosing an abnormal state of a substrate-processing apparatus includes measuring a temperature of a chuck in the substrate-processing apparatus. The temperature of the chuck is compared to a target temperature of the chuck, with a temperature-controlling unit. A control signal is analyzed to diagnose an abnormal state of the substrate-processing apparatus. The control signal is transmitted from the temperature-controlling unit to a drive parameter-applying unit configured to provide the chuck with a drive parameter.

Abstract: A designed waveform generator includes at least one first signal generator including a first switching device and generating a square wave having a constant voltage level during an on-period of the first switching device and at least one second signal generator including a second switching device and controlling a transition period of the second switching device to generate a variable waveform having a variable voltage level during the transition period of the second switching device. The at least one first signal generator and the at least one second signal generator are connected to each other in a cascade manner.

Abstract: A system for controlling fault tolerance may include a first controller connected to a driver, a first switch connected in parallel to the first controller, a first capacitor connected in parallel to the first switch, a second switch connected in parallel to the first capacitor and different from the first switch, a first power supply connected in parallel to the first capacitor and connected in series to the second switch, and a second capacitor connected to the first switch and a ground of the first power supply and different from the first capacitor. When the first controller is broken down, the second switch may be turned off to interrupt power supply from the first power supply, and the first switch may be turned on to discharge electric charges charged in the second capacitor.

Abstract: An electrostatic chuck assembly includes a reference temperature sensor, a measurement zone temperature sensor, and a measurement zone temperature calculator. The reference temperature sensor measures a reference temperature of the electrostatic chuck. The measurement zone temperature sensor is spaced from the reference temperature sensor on the electrostatic chuck and senses temperature signals of a plurality measurement zones of the electrostatic chuck. The measurement zone temperature calculator calculates a temperature of each of the measurement zones by setting a measurement range within a temperature range, previously determined based on the reference temperature measured by the reference temperature sensor, and measures the temperature signal of each of the measurement zones sensed by the measurement zone temperature sensor within the measurement range.

Abstract: An electrostatic chuck assembly includes a reference temperature sensor, a measurement zone temperature sensor, and a measurement zone temperature calculator. The reference temperature sensor measures a reference temperature of the electrostatic chuck. The measurement zone temperature sensor is spaced from the reference temperature sensor on the electrostatic chuck and senses temperature signals of a plurality measurement zones of the electrostatic chuck. The measurement zone temperature calculator calculates a temperature of each of the measurement zones by setting a measurement range within a temperature range, previously determined based on the reference temperature measured by the reference temperature sensor, and measures the temperature signal of each of the measurement zones sensed by the measurement zone temperature sensor within the measurement range.

Abstract: A dual inverter system to drive a motor in an electronic apparatus and a method of controlling the same include a first inverter connected to one side of a stator winding of the motor to modulate a pulse width and to adjust power supplied to the motor, a second inverter connected to the other side of the stator winding of the motor to modulate a pulse width and to adjust power supplied to the motor, a first current detector connected to the first inverter to detect a current flowing in the first inverter, a second current detector connected to the second inverter to detect a current flowing in the second inverter, and a controller to control the motor by controlling a pulse-width modulation (PWM) signal applied to the first inverter or the second inverter based on the current flowing in at least one of the first inverter and the second inverter.

Abstract: A system for controlling fault tolerance may include a first controller connected to a driver, a first switch connected in parallel to the first controller, a first capacitor connected in parallel to the first switch, a second switch connected in parallel to the first capacitor and different from the first switch, a first power supply connected in parallel to the first capacitor and connected in series to the second switch, and a second capacitor connected to the first switch and a ground of the first power supply and different from the first capacitor. When the first controller is broken down, the second switch may be turned off to interrupt power supply from the first power supply, and the first switch may be turned on to discharge electric charges charged in the second capacitor.

Abstract: A dual inverter system to drive a motor in an electronic apparatus and a method of controlling the same include a first inverter connected to one side of a stator winding of the motor to modulate a pulse width and to adjust power supplied to the motor, a second inverter connected to the other side of the stator winding of the motor to modulate a pulse width and to adjust power supplied to the motor, a first current detector connected to the first inverter to detect a current flowing in the first inverter, a second current detector connected to the second inverter to detect a current flowing in the second inverter, and a controller to control the motor by controlling a pulse-width modulation (PWM) signal applied to the first inverter or the second inverter based on the current flowing in at least one of the first inverter and the second inverter.

Abstract: A plasma display device is provided. The plasma display device includes a plasma display panel (PDP) including an upper substrate, on which first and second electrodes are formed, and a lower substrate, on which a third electrode is formed; and a driving unit applying a sustain signal to the first and second electrodes, wherein a negative voltage signal and a positive voltage signal are applied to the first and second electrodes, respectively, after a number of sustain discharges caused by the sustain signal. Therefore, it is possible to efficiently accumulate space charges on each electrode and thus to address the problems associated with a shortage of wall charges such as a misdischarge and a dark discharge.

Abstract: A plasma display device is provided. The plasma display device can reduce the capacity of a pass switch necessary for various driving circuits for applying various driving signals to a plasma display panel (PDP) and can thus contribute to the reduction of the manufacturing cost. In addition, the plasma display device can reduce the amount of heat generated by the various driving circuits and can thus contribute to the improvement of the reliability and the reduction of the power consumption.

Abstract: An energy recovery circuit is provided that includes: a panel capacitor formed equivalently in a scan electrode and a sustain electrode, a scan electrode driver installed at a side of the scan electrode of the panel capacitor to supply a sustaining pulse to the side of the scan electrode, and a sustain electrode driver installed at a side of the sustain electrode of the panel capacitor to supply the sustaining pulse to the side of the sustain electrode. The energy recovery circuit may further include a first diode coupled to the scan electrode side of the panel capacitor, a second diode coupled to the sustain electrode side of the panel capacitor, a first inductor commonly coupled to the sustain electrode side and the scan electrode side of the panel capacitor, a path providing part coupled to the first inductor, and a single source capacitor connected to the path providing part.