Patents by Inventor Sanghee EOM

Sanghee EOM has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate transfer apparatus and method, and substrate processing apparatus
    Patent number: 9390957
    Abstract: Provided are a substrate transfer apparatus and method and a substrate processing apparatus. The substrate transfer apparatus includes: a body portion; an arm part coupled to the body portion, the arm part moving to allow the substrate to be transferred; a suction part provided with the arm portion, the suction part suctioning and fixing the substrate; and a control part controlling an operation of the substrate transfer apparatus, wherein the control part changes a suction point on the substrate to re-attempt suction when suction of the substrate by the suction part is unsuccessful.
    Type: Grant
    Filed: November 25, 2014
    Date of Patent: July 12, 2016
    Assignee: PSK INC.
    Inventor: Sanghee Eom
  • SUBSTRATE TRANSFER APPARATUS AND METHOD, AND SUBSTRATE PROCESSING APPARATUS
    Publication number: 20150200122
    Abstract: Provided are a substrate transfer apparatus and method and a substrate processing apparatus. The substrate transfer apparatus includes: a body portion; an arm part coupled to the body portion, the arm part moving to allow the substrate to be transferred; a suction part provided with the arm portion, the suction part suctioning and fixing the substrate; and a control part controlling an operation of the substrate transfer apparatus, wherein the control part changes a suction point on the substrate to re-attempt suction when suction of the substrate by the suction part is unsuccessful.
    Type: Application
    Filed: November 25, 2014
    Publication date: July 16, 2015
    Inventor: Sanghee EOM