Abstract: A substrate transfer apparatus is provided. The substrate transfer apparatus includes: a robot unit installed at an end of an arm and having an end effector supporting a substrate; and a moving unit moving the robot unit, wherein the end effector includes: a body; supports installed on the body and supporting an underside of the substrate; and spark gaps installed on the body and inducing discharge to the outside of the body when charge accumulating on the substrate reaches a threshold value.

Abstract: Disclosed is a substrate transfer device including: a robot unit; and a moving unit configured to move the robot unit in a magnetic levitation manner along a first direction (X axis), in which the moving unit includes: a moving body including an electromagnet module that provides power for magnetic levitation; and a rail structure with a guide rail installed along the first direction to define a movement path of the moving body, and the electromagnet module includes: a body; electromagnets provided on an upper surface, a lower surface, and one side surface of the body the electromagnets being configured to levitate and guide the moving body; and an epoxy molding part formed by molding the body and the electromagnets with an epoxy resin.

Abstract: Disclosed is a transfer robot provided in a semiconductor manufacturing facility including a first transfer module and a second transfer module detachably coupled to the first transfer module. The transfer robot transfers a substrate while moving along the first and second transfer modules. The transfer robot includes a moving body moving along first and second tracks respectively mounted to the first and second transfer modules, an encoder module detecting a first scale mounted along the first track and a second scale mounted along the second track to generate a position signal, a controller detecting the position of the transfer robot based on the position signal, and a servo system controlling driving of the moving body in accordance with the detected position. The encoder module includes a first encoder and a second encoder mounted with an interval therebetween along the first track and in the longitudinal direction of the second track.

Abstract: A tower lift includes a rail module extending in a vertical direction, a plurality of carriage modules that are movable along the rail module, each carriage module having a carriage that carries an object, and an interference avoidance module that avoids travel interference between the carriage modules that move along the rail module.

Abstract: The present disclosure provides a substrate treating apparatus having improved efficiency and productivity. The substrate treating apparatus of the present disclosure comprises a process chamber having a treating space therein, a transfer robot comprising a robot hand for loading and unloading a substrate into and out of the treating space and gripping the substrate, and a teaching buffer for aligning the robot hand, wherein the teaching buffer comprises a teaching plate for providing a reference point, and at least one camera looking at the teaching plate, wherein the camera captures the reference point of the teaching plate, wherein the transfer robot aligns the robot hand with the reference point using the camera.

Abstract: A tower lift includes a main frame, a first carriage module and a second carriage module connected with each other inside the main frame at left and right sides of the main frame, respectively, having the same weight as each other, and configured to be moved in a vertical direction, and a driving module installed on the main frame and configured to move the first carriage module and the second carriage module in the vertical direction.

Abstract: A substrate transferring apparatus including a non-contact type driving unit is provided. The substrate transferring apparatus comprises a stator assembly including a driving surface and an electromagnetic generating module, a first mover including a first magnet module facing the electromagnetic generating module and floating and moving on the driving surface, and including a first inclined surface, a second mover including a second magnet module facing the electromagnetic generating module and floating and moving on the driving surface, and including a second inclined surface, and a transfer member disposed between the first mover and the second mover and moving along the first inclined surface and the second inclined surface according to a distance between the first mover and the second mover.

Abstract: The inventive concept provides a substrate transfer apparatus. The substrate transfer apparatus includes a base; a first transfer arm configured to have a first arm link connected to the base and a first end effector connected to the first arm link, and which operates between a contract position and an expand position; and a guide member aligning a substrate placed on the first end effector while the first transfer arm backwardly moves from the expand position to the contract position.

Abstract: A substrate transport robot capable of enhancing processing speed and avoiding interference with structures and a system including the substrate transport robot are provided. The substrate transport robot includes: one or more robot arms including transfer hands and transferring semiconductor substrates with the transfer hands; an arm driving module coupled to each of the robot arms and controlling the movement of each of the robot arms; and a horizontal/vertical movement module controlling the position movement of the arm driving module, wherein multiple robot arms are provided, and multiple transfer hands are included in each of the multiple robot arms.

Abstract: Embodiments of the inventive concept provide a wireless power apparatus for a substrate treating apparatus and a manufacturing method for the wireless power apparatus for the substrate treating apparatus for preventing a heat generation by preventing a generation of an eddy current in a coupling element, if the coupling element is used around an outer housing at which an induced magnetic field is formed. The inventive concept provides a wireless power apparatus for a substrate treating apparatus.

Abstract: A method and apparatus for aligning a wafer using a laser scanner, and a semiconductor transfer device are provided. The method includes a laser irradiation operation of irradiating a laser toward the wafer using a laser scanner disposed on a rear side or a lower side of the wafer and obtaining an image, a dataset acquisition operation of obtaining location information of at least three wafer edges by using a distance corresponding to a laser irradiation direction to a wafer edge in the image, a calculation operation of calculating a center point of the wafer by using the obtained location information of the wafer edge, and a detection operation of detecting whether a calculated center point is within a preset tolerance range.

Abstract: A system for manufacturing edible food products according to the present disclosure includes a first food ingredient supply apparatus configured to separate a single sheet of a first food ingredient from a first food ingredient stack including a plurality of stacked first food ingredients and supply the single sheet of first food ingredient, a second food ingredient supply apparatus configured to separate a single sheet of a second food ingredient from a second food ingredient stack including a plurality of stacked second food ingredients and supply the single sheet of second food ingredient, and a pressing device configured to form an edible food product by pressing a semi-finished product formed by seating the supplied single sheet of the first food ingredient on the supplied single sheet of the second food ingredient.

Abstract: An apparatus for supplying food ingredients according to the present disclosure includes a food ingredient lifting part configured to separate and move upward a food ingredient stack from a food ingredient cassette on which food ingredients including a plurality of stacked food ingredients are seated, a food ingredient separation part configured to suck and move upward a single sheet of a food ingredient from the food ingredient stack moved upward by the food ingredient lifting part, and a horizontal movement part configured to transfer forward the single sheet of the food ingredient moved upward by the food ingredient separation part.

Abstract: A cutting apparatus according to the present disclosure includes a cutting roller including a cutting body having a cylindrical shape and configured to rotate about an axis defined in a leftward/rightward direction, and cutting blades protruding outward in a radial direction of the cutting body further than a surface of the cutting body to cut an edible food product provided in a forward/rearward direction, and a cutting base part disposed at a position facing the cutting roller based on the edible food product to support the edible food product to be cut by the cutting roller.

Abstract: An apparatus and method of detecting a wafer edge using a laser scanner, and a semiconductor transfer device are provided. The apparatus for detecting a wafer edge using a laser scanner includes a laser scanner disposed on a rear side of a mounted wafer and radiating a laser to a portion of an edge of the wafer, and a detection unit receiving an image acquired by the laser scanner and detecting the wafer edge in the image. The detection unit determines whether each wafer is present or aligned according to wafer edges detected in a plurality of wafer areas in the image.

Abstract: A transfer part may move the first substrate and the second substrate such that the first substrate and the second substrate are overlapped with each other when the transport transfers the first substrate and the second substrate. The detection part may detect a first position of the first substrate and a first position of the second substrate at points apart from a reference point where the first substrate and the second substrate are overlapped by first distances, and may detect respective second positions at points apart from the reference point by second distances. A control part may control movements of the first and the second substrates by the transfer part based on output of the detection part.

Abstract: Proposed is a power supply apparatus capable of suppressing heat generation, and semiconductor manufacturing equipment and a transport system including the same. The power supply apparatus, which supplies power to a transport device in semiconductor manufacturing equipment, includes a first base member made of a conductive material installed along a moving path of the transport device, a second base member provided on a surface of the first base member and made of a magnetic core material, a track member provided as an installation structure disposed on a side of the second base member, a power supply member installed in the track member and to which current is applied to supply power, and a power reception member disposed in a power reception core member provided in the transport device at a predetermined interval from the power supply member, and magnetically coupled to the power supply member to generate an induced current.

Abstract: The present invention provides a tower lift. The tower lift includes: a rail module extended in a vertical direction; and a carriage module provided to be movable by a magnetic levitation method along the rail module, in which in the carriage module, a braking unit which brakes falling of the carriage module when power driving the tower lift is cut is installed.

Abstract: The present invention relates to a smart home controller refrigerator and a control method therefor, the smart home controller refrigerator, according to one embodiment of the present invention, comprising: a control unit comprising a control protocol communication unit for receiving control information for controlling a home appliance in a home, an operation protocol communication unit for generating an operation signal calculated from the control information, and a signal transmission unit for transmitting the operation signal to the home appliance; at least one storage space; and at least one door for controlling the opening/closing of the at least one storage space.

Abstract: A refrigerator with a sound reproducing capability is provided. The refrigerator may include a cabinet forming an exterior of the refrigerator and having an upper surface portion, a lower surface portion, a side surface portion, and a rear surface portion, a door coupled to the cabinet, a vibration module attached to an inner surface of at least one among the door, the upper surface portion, the side surface portion, the rear surface portion, and the lower surface portion, and a controller configured to control vibration of the vibration module. The vibration strength of the vibration module and power supplied to the vibration module may be determined by a trained model trained through machine learning, an area of artificial intelligence (AI). In addition, the refrigerator may include a communicator, and may operate in conjunction with an external device via 5G communication.