Patents by Inventor Sangpyoung Jeon

Sangpyoung Jeon has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma monitoring device using a cylindrical hollow electrode
    Patent number: 8767203
    Abstract: A plasma generating unit for a process monitoring device includes a hollow first electrode extending in a length direction and a second electrode extending in the length direction and positioned within and displaced from the first electrode with a distance therebetween. The first electrode has an inner diameter and the second electrode has an outer diameter selected to vary the distance between the electrodes in the length direction so that the plasma generating unit generates a plasma by ionizing a gas flowing between the electrodes at a different position in the length direction based on a pressure of the gas.
    Type: Grant
    Filed: August 25, 2011
    Date of Patent: July 1, 2014
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Se-Yeon Kim, Hun Jung Yi, Sangpyoung Jeon, Hyojin Yun
  • Plasma Generating Units and Process Monitoring Devices and Semiconductor Process Apparatus Including the Same
    Publication number: 20120062887
    Abstract: A plasma generating unit for a process monitoring device includes a hollow first electrode extending in a length direction and a second electrode extending in the length direction and positioned within and displaced from the first electrode with a distance therebetween. The first electrode has an inner diameter and the second electrode has an outer diameter selected to vary the distance between the electrodes in the length direction so that the plasma generating unit generates a plasma by ionizing a gas flowing between the electrodes at a different position in the length direction based on a pressure of the gas.
    Type: Application
    Filed: August 25, 2011
    Publication date: March 15, 2012
    Inventors: Se-Yeon Kim, Hun Jung Yi, Sangpyoung Jeon, Hyojin Yun