Patents by Inventor Sanjiv Babubhai Patel

Sanjiv Babubhai Patel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor process tool incorporating heat exchanger
    Patent number: 6705095
    Abstract: The present invention is directed to heat exchangers for process tools and, in particular, to semiconductor process tools incorporating heat exchangers. In one embodiment, the present invention is directed to a semiconductor process tool heat exchange system. The system includes a heat exchange system and a semiconductor process tool comprising an inlet and an outlet defining a flow path. The heat exchange system includes a compressor fluidly connected to the outlet, a condenser fluidly connected to the compressor and to the inlet, an expander positioned between the condenser and the outlet, and a heat exchange fluid. Examples of process tools suitable for use in this system include cathodes, cold plates, thermal chucks, and the like. In another embodiment, the present invention is directed to a method of exchanging heat in a semiconductor process tool.
    Type: Grant
    Filed: March 8, 2002
    Date of Patent: March 16, 2004
    Assignee: Kinetics Thermal Systems, Inc.
    Inventors: Taylor Norris Thompson, Jr., Sanjiv Babubhai Patel
  • SEMICONDUCTOR PROCESS TOOL INCORPORATING HEAT EXCHANGER
    Publication number: 20030167781
    Abstract: The present invention is directed to heat exchangers for process tools and, in particular, to semiconductor process tools incorporating heat exchangers. In one embodiment, the present invention is directed to a semiconductor process tool heat exchange system. The system includes a heat exchange system and a semiconductor process tool comprising an inlet and an outlet defining a flow path. The heat exchange system includes a compressor fluidly connected to the outlet, a condenser fluidly connected to the compressor and to the inlet, an expander positioned between the condenser and the outlet, and a heat exchange fluid. Examples of process tools suitable for use in this system include cathodes, cold plates, thermal chucks, and the like. In another embodiment, the present invention is directed to a method of exchanging heat in a semiconductor process tool.
    Type: Application
    Filed: March 8, 2002
    Publication date: September 11, 2003
    Inventors: Taylor Norris Thompson, Sanjiv Babubhai Patel