Patents by Inventor Santhi E. Mathew

Santhi E. Mathew has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7451654
    Abstract: A system and method are described for maintaining power dissipation substantially constant across the sensor interface board of a capacitance pressure transducer. A shorted diaphragm level detector detects a shorting of the diaphragm onto one or more reference electrodes. A power dissipating resistor is placed near the oscillator that drives the capacitance detecting circuit in the capacitance pressure transducer. The resistor is switched across a power supply when the shorting is detected, causing current to flow through the resistor so that power can be added in an amount sufficient to maintain power dissipation by the oscillator substantially constant when the diaphragm shorts.
    Type: Grant
    Filed: August 9, 2007
    Date of Patent: November 18, 2008
    Assignee: MKS Instruments, Inc.
    Inventors: Philip J. Maiorana, Santhi E. Mathew
  • Patent number: 6772640
    Abstract: A heater is disclosed for use with pressure transducers. The disclosed heater includes a first heating element and a second heating element. The first heating element is characterized by a first electrical resistance. The second heating element is characterized by a second electrical resistance. In preferred embodiments, the first electrical resistance is different than the second electrical resistance. The disclosed heater can be used to accurately heat a pressure transducer to at least four different operating temperatures by selectively (a) connecting the first heating element to the transducer temperature control circuitry, (b) connecting the second heating element to the transducer temperature control circuitry, (c) connecting the first and second heating elements in series with the transducer temperature control circuitry, or (d) connecting the first and second heating elements in parallel with the transducer temperature control circuitry.
    Type: Grant
    Filed: October 10, 2000
    Date of Patent: August 10, 2004
    Assignee: MKS Instruments, Inc.
    Inventors: Claudia J. Quigley, Kerry S. Lahey, Santhi E. Mathew, J. Robert Maxwell, Jr., Leonid Mindlin, James M. Poulin, Gardy St. Paul
  • Patent number: 6687635
    Abstract: A compensated sensor includes a sensor, a relatively fast feedthrough path, and a relatively slow compensation path. The relatively fast feedthrough path includes a summer and output circuitry, such as a summing amplifier. The relatively slow compensation path includes circuitry that produces one or more correction factors for such sensor deficiencies as temperature dependency, or nonlinearity effects, for example. These one or more correction factors are fed to the summer for summing with the uncompensated sensor output. Additionally, the output of the output circuitry (e.g., summing amplifier), is fed back to the compensation circuitry where it is compared to a compensated sensor output developed by the compensation circuitry. The difference between the compensated sensor signal developed in the compensation circuitry and the output signal fed back to the compensation circuitry is also provided to the summer for summing with the one or more correction factors and the uncompensated sensor output.
    Type: Grant
    Filed: June 13, 2002
    Date of Patent: February 3, 2004
    Assignee: MKS Instruments, Inc.
    Inventors: Stephen F. Horne, Philip J. Maiorana, Santhi E. Mathew, Leonid Mindlin, Claudia J. Quigley, Eric R. Taranto, Donald K. Smith
  • Patent number: 6612176
    Abstract: A capacitive pressure transducer including a heater shell, a capacitive pressure sensor, an electronics assembly and a thermal barrier is presented. The sensor and the electronics assembly are disposed in the heater shell. The thermal barrier is also disposed in the heater shell and is disposed between the sensor and electronics assembly.
    Type: Grant
    Filed: December 28, 2000
    Date of Patent: September 2, 2003
    Assignee: MKS Instruments, Inc.
    Inventors: James M. Poulin, Santhi E. Mathew, Leonid Mindlin, Claudia J. Quigley, Stephen D. Blankenship
  • Patent number: 6588280
    Abstract: A method is disclosed for providing transient temperature compensation in a pressure transducer. The transducer includes a capacitive pressure sensor, the pressure sensor including a diaphragm, at least part of the diaphragm moving in response to changes in a pressure. The transducer may further include an electronic circuit which generates an uncompensated output signal representative of the pressure. The disclosed method generates a compensated output signal according to a function of the uncompensated output signal and a difference between a temperature of the pressure sensor and a temperature of the ambient environment.
    Type: Grant
    Filed: April 22, 2002
    Date of Patent: July 8, 2003
    Assignee: MKS Instruments, Inc.
    Inventors: Claudia J. Quigley, Santhi E. Mathew, Leonid Mindlin, James M. Poulin
  • Publication number: 20030121332
    Abstract: A pressure transducer has an output characterized by two or more slopes. A pressure transducer generates an first output signal that may be linearly proportional to the sensed pressure. The pressure transducer includes an electrical circuit that shapes the first output signal to produce a shaped output signal that according to a first function of the first output signal when the first output signal is less than the first value and according to a second function of the first output signal when the first output signal is greater than a second value. Preferably, the shaped output signal is a dual slope signal such that the shaped output signal has a first linear portion characterized by a first slope and a second linear portion characterized by a second slope. The two linear portions of the shaped output signal may intersect at a knee point which corresponds to a pressure between two preferred desired pressure ranges.
    Type: Application
    Filed: December 21, 2001
    Publication date: July 3, 2003
    Inventors: Santhi E. Mathew, Kerry S. Lahey, Leonid Mindlin, Jim M. Poulin, Claudia J. Quigley, Gardy F. St.Paul, Irving Weiner
  • Publication number: 20020083774
    Abstract: A capacitive pressure transducer is disclosed. The disclosed transducer includes a heater shell, a capacitive pressure sensor, an electronics assembly, and a thermal barrier. The sensor and electronics assembly are disposed in the heater shell. The thermal barrier is also disposed in the heater shell and is disposed between the sensor and electronics assembly.
    Type: Application
    Filed: December 28, 2000
    Publication date: July 4, 2002
    Inventors: James M. Poulin, Santhi E. Mathew, Leonid Mindlin, Claudia J. Quigley, Steven D. Blankenship