Abstract: A computing system implementing a physical verification tool can identify edges of a geometric pattern located within a search area surrounding a point of interest in a semiconductor layout design, characterize the edges of the geometric pattern based on locations of center points of the edges from the point of interest within the search area, and generate geometrical feature vectors for the point of interest in the semiconductor layout design based on the characterization of the edges of the geometric pattern. The computing system can reconstruct the semiconductor layout design corresponding to the search area surrounding the point of interest using the geometrical feature vectors for the point of interest in the semiconductor layout design.

Abstract: A computing system implementing a physical verification tool can determine principal feature components describing geometric patterns around points of interest in a semiconductor layout design. The principal feature components include topological features indicating whether structures are present around the points of interest, and include dimensional features corresponding to measurements associated with the structures present around the points of interest. The physical verification tool can generate a topological signature for each of the points of interest based on the topological features, and cluster the points of interest into different subsets based on the topological signature.