Abstract: A semiconductor substrate includes a first semiconductor layer, a first dielectric layer coupled to the first semiconductor layer, and a second semiconductor layer coupled to the first dielectric layer. The second semiconductor layer includes a base portion substantially aligned with the first dielectric layer and a cantilever portion protruding from an end of the first dielectric layer. The cantilever portion includes a tapered surface tapering from a bottom surface of the second semiconductor layer toward a top surface of the second semiconductor layer.

Abstract: A semiconductor substrate includes a first semiconductor layer, a first dielectric layer coupled to the first semiconductor layer, and a second semiconductor layer coupled to the first dielectric layer. The second semiconductor layer includes a base portion substantially aligned with the first dielectric layer and a cantilever portion protruding from an end of the first dielectric layer. The cantilever portion includes a tapered surface tapering from a bottom surface of the second semiconductor layer toward a top surface of the second semiconductor layer.

Abstract: A method of forming a tapered tip of a polarization-maintaining (PM) fiber includes inserting a tip of the PM fiber into a first etchant solution characterized by a first etching rate for the core of the PM fiber and a second etching rate for the stress members of the PM fiber, the second etching rate being lower than the first etching rate, withdrawing the tip of the PM fiber from the first etchant solution at a withdrawal rate, immersing the tip of the PM fiber in a second etchant solution for a time duration. The second etchant solution is characterized by a third etching rate for the core and a fourth etching rate for the stress members, the fourth etching rate being greater than the third etching rate. The method further includes withdrawing the tip of the PM fiber from the second etchant solution.

Abstract: A method for fabricating a cantilever having a device surface, a tapered surface, and an end region includes providing a semiconductor substrate having a first side and a second side opposite to the first side and etching a predetermined portion of the second side to form a plurality of recesses in the second side. Each of the plurality of recesses comprises an etch termination surface. The method also includes anisotropically etching the etch termination surface to form the tapered surface of the cantilever and etching a predetermined portion of the device surface to release the end region of the cantilever.

Abstract: A method for fabricating a cantilever having a device surface, a tapered surface, and an end region includes providing a semiconductor substrate having a first side and a second side opposite to the first side and etching a predetermined portion of the second side to form a plurality of recesses in the second side. Each of the plurality of recesses comprises an etch termination surface. The method also includes anisotropically etching the etch termination surface to form the tapered surface of the cantilever and etching a predetermined portion of the device surface to release the end region of the cantilever.

Abstract: A method of forming a tapered tip of a polarization-maintaining (PM) fiber includes inserting a tip of the PM fiber into a first etchant solution characterized by a first etching rate for the core of the PM fiber and a second etching rate for the stress members of the PM fiber, the second etching rate being lower than the first etching rate, withdrawing the tip of the PM fiber from the first etchant solution at a withdrawal rate, immersing the tip of the PM fiber in a second etchant solution for a time duration. The second etchant solution is characterized by a third etching rate for the core and a fourth etching rate for the stress members, the fourth etching rate being greater than the third etching rate. The method further includes withdrawing the tip of the PM fiber from the second etchant solution.

Abstract: A fiber scanning system includes a fiber optic element having an actuation region and a motion actuator mechanically coupled to the fiber optic element. A continuous bond line is present between the actuation region and the motion actuator. The fiber scanning system also includes a retention collar mechanically coupled to the motion actuator.