Patents by Inventor Sarah Emily Treece

Sarah Emily Treece has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHODS TO IMPROVE THE CRYSTALLINITY OF PbZrTiO3 AND Pt FILMS FOR MEMS APPLICATIONS
    Publication number: 20150380635
    Abstract: A microelectronic device containing a piezoelectric component is formed sputtering an adhesion layer of titanium on a substrate by an ionized metal plasma (IMP) process. The adhesion layer is oxidized so that at least a portion of the titanium is converted to a layer of substantially stoichiometric titanium dioxide (TiO2) at a top surface of the adhesion layer. A layer of platinum is formed on the titanium dioxide of the adhesion layer; the layer of platinum has a (111) crystal orientation and an X-ray rocking curve FWHM value of less than 3 degrees. A layer of piezoelectric material is formed on the layer of platinum. The piezoelectric material may include lead zirconium titanate.
    Type: Application
    Filed: June 9, 2015
    Publication date: December 31, 2015
    Applicant: Texas Instruments Incorporated
    Inventors: Bhaskar Srinivasan, Sarah Emily Treece, YungShan Chang, Ollen Harvey Mullis, Mary Alyssa Drummond Roby