Patents by Inventor Sarah Langlois WHITE

Sarah Langlois WHITE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Precursor delivery system and methods related thereto
    Patent number: 11009455
    Abstract: Systems and methods used to deliver a processing gas having a desired diborane concentration to a processing volume of a processing chamber are provided herein. In one embodiment a system includes a borane concentration sensor. The borane concentration sensor includes a body and a plurality of windows. Here, individual ones of the plurality of windows are disposed at opposite ends of the body and the body and the plurality of windows collectively define a cell volume. The borane concentration sensor further includes a radiation source disposed outside of the cell volume proximate to a first window of the plurality of windows, and a radiation detector disposed outside the cell volume proximate to a second window of the plurality of windows.
    Type: Grant
    Filed: July 2, 2019
    Date of Patent: May 18, 2021
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Zubin Huang, Sarah Langlois White, Jonathan Robert Bakke, Diwakar N. Kedlaya, Juan Carlos Rocha, Fang Ruan
  • PRECURSOR DELIVERY SYSTEM AND METHODS RELATED THERETO
    Publication number: 20200041407
    Abstract: Systems and methods used to deliver a processing gas having a desired diborane concentration to a processing volume of a processing chamber are provided herein. In one embodiment a system includes a borane concentration sensor. The borane concentration sensor includes a body and a plurality of windows. Here, individual ones of the plurality of windows are disposed at opposite ends of the body and the body and the plurality of windows collectively define a cell volume. The borane concentration sensor further includes a radiation source disposed outside of the cell volume proximate to a first window of the plurality of windows, and a radiation detector disposed outside the cell volume proximate to a second window of the plurality of windows.
    Type: Application
    Filed: July 2, 2019
    Publication date: February 6, 2020
    Inventors: Zubin HUANG, Sarah Langlois WHITE, Jonathan Robert BAKKE, Diwakar N. KEDLAYA, Juan Carlos ROCHA, Fang RUAN