Patents by Inventor Sarah Nitzan

Sarah Nitzan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10732196
    Abstract: A microelectromechanical (MEMS) accelerometer senses linear acceleration perpendicular to a MEMS device plane of the MEMS accelerometer based on a rotation of a proof mass out-of-plane about a rotational axis. A symmetry axis is perpendicular to the rotational axis. The proof mass includes a symmetric portion that is symmetric about the symmetry axis and that is contiguous with an asymmetric portion that is asymmetric about the symmetry axis.
    Type: Grant
    Filed: November 30, 2017
    Date of Patent: August 4, 2020
    Assignee: InvenSense, Inc.
    Inventors: Matthew Thompson, Houri Johari-Galle, Leonardo Baldasarre, Sarah Nitzan, Kirt Williams
  • Patent number: 10649002
    Abstract: Techniques for self-adjusting calibration of offset and sensitivity of a MEMS accelerometer are provided. In one example, a system comprises a first microelectromechanical (MEMS) sensor. The first MEMS sensor comprises: a proof mass coupled to an anchor connected to a reference plane, wherein the proof mass is coupled to the anchor via a first spring and a second spring; a plurality of reference paddles coupled to the anchor; and a plurality of acceleration sensing electrodes disposed on the reference plane, wherein a first area of each of the acceleration sensing electrodes is larger than a second area of each of a plurality of reference electrodes associated with the plurality of reference paddles.
    Type: Grant
    Filed: July 31, 2017
    Date of Patent: May 12, 2020
    Assignee: INVENSENSE, INC.
    Inventors: Matthew Julian Thompson, Joseph Seeger, Sarah Nitzan
  • Patent number: 10571268
    Abstract: A MEMS sensor includes a MEMS layer, a cap layer, and a substrate layer. The MEMS layer includes a suspended spring-mass system that moves in response to a sensed inertial force. The suspended spring-mass system is suspended from one or more anchors. The anchors are coupled to each of the cap layer and the substrate layer by anchoring components. The anchoring components are offset such that a force applied to the cap layer or the substrate layer causes a rotation of the anchor and such that the suspended spring-mass system substantially remains within the original MEMS layer.
    Type: Grant
    Filed: November 30, 2017
    Date of Patent: February 25, 2020
    Assignee: InvenSense, Inc.
    Inventors: Matthew Thompson, Houri Johari-Galle, Leonardo Baldasarre, Sarah Nitzan, Kirt Williams
  • Publication number: 20190187172
    Abstract: Facilitating self-calibration of a sensor device via modification of a sensitivity of the sensor device is presented herein. A sensor system can comprise a sensor component comprising a sensor that generates an output signal based on an external excitation of the sensor; a sensitivity modification component that modifies a sensitivity of the sensor by a defined amount; and a calibration component that measures a first output value of the output signal before a modification of the sensitivity by the defined amount, measures a second output value of the output signal after the modification of the sensitivity by the defined amount, and determines, based on a difference between the first output value and the second output value, an offset portion of the output signal. Further, the calibration component can modify, based on the offset portion, the output signal.
    Type: Application
    Filed: November 30, 2018
    Publication date: June 20, 2019
    Inventors: Matthew Julian Thompson, David deKoninck, Sarah Nitzan, Houri Johari-Galle
  • Publication number: 20190162538
    Abstract: A MEMS sensor includes a MEMS layer, a cap layer, and a substrate layer. The MEMS layer includes a suspended spring-mass system that moves in response to a sensed inertial force. The suspended spring-mass system is suspended from one or more anchors. The anchors are coupled to each of the cap layer and the substrate layer by anchoring components. The anchoring components are offset such that a force applied to the cap layer or the substrate layer causes a rotation of the anchor and such that the suspended spring-mass system substantially remains within the original MEMS layer.
    Type: Application
    Filed: November 30, 2017
    Publication date: May 30, 2019
    Applicant: InvenSense, Inc.
    Inventors: Matthew Thompson, Houri Johari-Galle, Leonardo Baldasarre, Sarah Nitzan, Kirt Williams
  • Publication number: 20190162747
    Abstract: A microelectromechanical (MEMS) accelerometer senses linear acceleration perpendicular to a MEMS device plane of the MEMS accelerometer based on a rotation of a proof mass out-of-plane about a rotational axis. A symmetry axis is perpendicular to the rotational axis. The proof mass includes a symmetric portion that is symmetric about the symmetry axis and that is contiguous with an asymmetric portion that is asymmetric about the symmetry axis.
    Type: Application
    Filed: November 30, 2017
    Publication date: May 30, 2019
    Applicant: InvenSense, Inc.
    Inventors: Matthew Thompson, Houri Johari-Galle, Leonardo Baldasarre, Sarah Nitzan, Kirt Williams
  • Publication number: 20190033342
    Abstract: Techniques for self-adjusting calibration of offset and sensitivity of a MEMS accelerometer are provided. In one example, a system comprises a first microelectromechanical (MEMS) sensor. The first MEMS sensor comprises: a proof mass coupled to an anchor connected to a reference plane, wherein the proof mass is coupled to the anchor via a first spring and a second spring; a plurality of reference paddles coupled to the anchor; and a plurality of acceleration sensing electrodes disposed on the reference plane, wherein a first area of each of the acceleration sensing electrodes is larger than a second area of each of a plurality of reference electrodes associated with the plurality of reference paddles.
    Type: Application
    Filed: July 31, 2017
    Publication date: January 31, 2019
    Inventors: Matthew Julian Thompson, Joseph Seeger, Sarah Nitzan
  • Publication number: 20180238927
    Abstract: A MEMS sensor includes a proof mass that is suspended over a substrate. A sense electrode is located on a top surface of the substrate parallel to the proof mass, and forms a capacitor with the proof mass. The sense electrodes have a plurality of slots that provide improved performance for the MEMS sensor. A measured value sensed by the MEMS sensor is determined based on the movement of the proof mass relative to the slotted sense electrode.
    Type: Application
    Filed: May 4, 2017
    Publication date: August 23, 2018
    Applicant: InvenSense, Inc.
    Inventors: Alexander Castro, Matthew Thompson, Leonardo Baldasarre, Sarah Nitzan, Houri Johari-Galle