Abstract: A micro-fabricated device for controlling trapped ions includes a first substrate having a main surface. A structured first metal layer is disposed over the main surface of the first substrate. The structured first metal layer includes electrodes of at least one ion trapping zone configured to trap an ion in a space above the structured first metal layer. A dielectric element is fixedly attached to the first substrate. The dielectric element includes at least one laser light path and a surface covered with a layer. The layer is an electrically conductive layer. The layer is optically transparent for the laser light. The layer is arranged between the at least one laser light path and the at least one ion trapping zone.