Patents by Inventor Sarath Shekkizhar

Sarath Shekkizhar has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Optimizing training sets used for setting up inspection-related algorithms
    Patent number: 10267748
    Abstract: Methods and systems for training an inspection-related algorithm are provided. One system includes one or more computer subsystems configured for performing an initial training of an inspection-related algorithm with a labeled set of defects thereby generating an initial version of the inspection-related algorithm and applying the initial version of the inspection-related algorithm to an unlabeled set of defects. The computer subsystem(s) are also configured for altering the labeled set of defects based on results of the applying. The computer subsystem(s) may then iteratively re-train the inspection-related algorithm and alter the labeled set of defects until one or more differences between results produced by a most recent version and a previous version of the algorithm meet one or more criteria. When the one or more differences meet the one or more criteria, the most recent version of the inspection-related algorithm is outputted as the trained algorithm.
    Type: Grant
    Filed: October 12, 2017
    Date of Patent: April 23, 2019
    Assignee: KLA-Tencor Corp.
    Inventors: Martin Plihal, Erfan Soltanmohammadi, Saravanan Paramasivam, Sairam Ravu, Ankit Jain, Sarath Shekkizhar, Prasanti Uppaluri
  • Optimizing Training Sets Used for Setting Up Inspection-Related Algorithms
    Publication number: 20180106732
    Abstract: Methods and systems for training an inspection-related algorithm are provided. One system includes one or more computer subsystems configured for performing an initial training of an inspection-related algorithm with a labeled set of defects thereby generating an initial version of the inspection-related algorithm and applying the initial version of the inspection-related algorithm to an unlabeled set of defects. The computer subsystem(s) are also configured for altering the labeled set of defects based on results of the applying. The computer subsystem(s) may then iteratively re-train the inspection-related algorithm and alter the labeled set of defects until one or more differences between results produced by a most recent version and a previous version of the algorithm meet one or more criteria. When the one or more differences meet the one or more criteria, the most recent version of the inspection-related algorithm is outputted as the trained algorithm.
    Type: Application
    Filed: October 12, 2017
    Publication date: April 19, 2018
    Inventors: Martin Plihal, Erfan Soltanmohammadi, Saravanan Paramasivam, Sairam Ravu, Ankit Jain, Sarath Shekkizhar, Prasanti Uppaluri