Patents by Inventor Sascha Licht

Sascha Licht has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Connecting arrangement for an optical device
    Patent number: 8305701
    Abstract: The disclosure relates to a connecting arrangement for an optical device, such as in microlithography. The connecting arrangement includes a first body, a second body and a connecting device. The first body contacts the second body in a laminar manner in a contact region. The connecting device is connected to the second body and contacts the first body via at least one contact unit. The connecting device is configured to generate a predefinable contact force in the contact region between the first body and the second body. The contact unit includes a plurality of separate contact elements. Each contact element is connected to the second body via a spring unit which can be elastically deformed to generate a contribution to the contact force.
    Type: Grant
    Filed: September 17, 2009
    Date of Patent: November 6, 2012
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Heiko Methe, Willi Heintel, Sascha Licht
  • CONNECTING ARRANGEMENT FOR AN OPTICAL DEVICE
    Publication number: 20100065252
    Abstract: The disclosure relates to a connecting arrangement for an optical device, such as in microlithography. The connecting arrangement includes a first body, a second body and a connecting device. The first body contacts the second body in a laminar manner in a contact region. The connecting device is connected to the second body and contacts the first body via at least one contact unit. The connecting device is configured to generate a predefinable contact force in the contact region between the first body and the second body. The contact unit includes a plurality of separate contact elements.
    Type: Application
    Filed: September 17, 2009
    Publication date: March 18, 2010
    Applicant: CARL ZEISS SMT AG
    Inventors: Heiko Methe, Willi Heintel, Sascha Licht