Abstract: A LIDAR system including a MEMS scanning device is disclosed. The LIDAR system includes a light source, a light deflector, a sensor, and a processor. The light deflector deflects light from the light source or light received from an environment outside a vehicle in which the LIDAR system is installed. The sensor detects the light received from the light source or the environment. The processor determines a distance of one or more objects in the environment from the vehicle based on the signals from the sensor. The light deflector includes one or more actuators, which include one or more actuating arms. Connectors connect the actuating arms to an MEMS mirror or other deflector. The actuating arms move when subjected to an electrical field in the form of a voltage or current. Movement of the actuating arms causes movement of the MEMS mirror or deflector causing it to deflect light.

Abstract: A LIDAR system including a MEMS scanning device is disclosed. The LIDAR system includes a light source, a light deflector, a sensor, and a processor. The light deflector deflects light from the light source or light received from an environment outside a vehicle in which the LIDAR system is installed. The sensor detects the light received from the light source or the environment. The processor determines a distance of one or more objects in the environment from the vehicle based on the signals from the sensor. The light deflector includes one or more actuators, which include one or more actuating arms. Connectors connect the actuating arms to an MEMS mirror or other deflector. The actuating arms move when subjected to an electrical field in the form of a voltage or current. Movement of the actuating arms causes movement of the MEMS mirror or deflector causing it to deflect light.

Abstract: An electro-optical system may include a light source configured to emit a beam of radiation, and a pivotable scanning mirror configured to project the beam of radiation toward a field of view. The electro-optical system may also include a first electrode associated with the scanning mirror, and a plurality of second electrodes spaced apart from the first electrode. The electro-optical system may further include a processor programmed to determine a capacitance value for each of the second electrodes relative to the first electrode. Each of the determined capacitance values may have an accuracy in a range of ± 1/100 to ± 1/1000 of a difference between a highest capacitance value and a lowest capacitance value between the first electrode and a respective one of the second electrodes. The processor may also be programmed to determine an orientation of the scanning mirror based on one or more of the determined capacitance values.

Abstract: A method for controlling operation of a MEMS mirror includes steps for: generating activation pulses for operating the MEMS mirror and generating a window activation signal for current detection, with the window activation signal overlapping with an end of an activation pulse. The method also includes detecting current through a stator or a rotor of the MEMS mirror during the window activation signal and terminating a current activation pulse and the window activation signal in response to detecting a change in the direction of the current through the stator or the rotor of the MEMS mirror during the window activation signal.

Abstract: A projector includes a first laser source projecting a first laser beam, a second laser source projecting a second laser beam at an angle with respect to the first laser beam, and a mirror reflecting the first and second laser beams. Circuitry controls the mirror to simultaneously reflect the first and second laser beams in a first scan pattern to form a first image having a number of scan lines greater than two times a horizontal resonance frequency of the mirror divided by a desired frame rate of the first image. The first laser beam forms a first angle of incidence with the mirror and the second laser beam forms a second angle of incidence with the mirror, the second angle of incidence being equal to the first angle of incidence summed with the angle of the second laser beam with respect to the first laser beam.

Abstract: The method for controlling an angular position of a MEMS mirror, includes: applying a first driving moment to the MEMS mirror to generate a rotational scanning movement of the mirror; and, at a zooming instant, applying a second driving moment to the MEMS mirror, wherein the second driving moment is equal to the first driving moment plus an extra moment. The extra moment may be a DC offset. After a transient period of time from zooming instant, a third driving moment M2=k{dot over (?)}2t is applied. The first and third driving moment are variable linearly with time. The driving moments are applied to torsional springs of the mirror.

Abstract: A projector includes a first laser source projecting a first laser beam, a second laser source projecting a second laser beam at an angle with respect to the first laser beam, and a mirror reflecting the first and second laser beams. Circuitry controls the mirror to simultaneously reflect the first and second laser beams in a first scan pattern to form a first image having a number of scan lines greater than two times a horizontal resonance frequency of the mirror divided by a desired frame rate of the first image. The first laser beam forms a first angle of incidence with the mirror and the second laser beam forms a second angle of incidence with the mirror, the second angle of incidence being equal to the first angle of incidence summed with the angle of the second laser beam with respect to the first laser beam.

Abstract: A method for controlling operation of a MEMS mirror includes steps for: generating activation pulses for operating the MEMS mirror and generating a window activation signal for current detection, with the window activation signal overlapping with an end of an activation pulse. The method also includes detecting current through a stator or a rotor of the MEMS mirror during the window activation signal and terminating a current activation pulse and the window activation signal in response to detecting a change in the direction of the current through the stator or the rotor of the MEMS mirror during the window activation signal.

Abstract: Disclosed herein is an electronic device including a first laser source configured to project a first laser beam, and a second laser source configured to project a second laser beam in alignment with the first laser beam in a first direction but at an angle with respect to the first laser beam in a second direction. A mirror apparatus is positioned so as to reflect the first and second laser beams. Control circuitry is configured to control the mirror apparatus to simultaneously reflect the first and second laser beams in a first scan pattern to form an first image, the first image formed from the first scan pattern having a number of scan lines greater than two times a horizontal resonance frequency at which the mirror apparatus oscillates divided by a desired frame rate of the first image.

Abstract: The present disclosure provides a system and method for controlling operation of a resonance MEMS mirror. The system and method includes activating either an in-plane or staggered MEMS mirror via sets of activation pulses applied to the MEMS mirror, detecting current at the MEMS mirror, generating a window for detecting a change in a direction of the current at the MEMS mirror, and terminating the window and the activation pulse if a change in the current direction is detected during the window. In some embodiments, two sets of activation pulses are applied to the MEMS mirror.

Abstract: Disclosed herein is an electronic device including a first laser source configured to project a first laser beam, and a second laser source configured to project a second laser beam in alignment with the first laser beam in a first direction but at an angle with respect to the first laser beam in a second direction. A mirror apparatus is positioned so as to reflect the first and second laser beams. Control circuitry is configured to control the mirror apparatus to simultaneously reflect the first and second laser beams in a first scan pattern to form an first image, the first image formed from the first scan pattern having a number of scan lines greater than two times a horizontal resonance frequency at which the mirror apparatus oscillates divided by a desired frame rate of the first image.

Abstract: Disclosed herein is a circuit for determining failure of a movable MEMS mirror. The circuit includes an integrator receiving an opening angle signal representing an opening angle of the movable MEMS mirror, and a differentiator receiving the opening angle signal. A summing circuit is configured to sum the integrator output and the differentiator output. A comparison circuit is configured to determine whether the sum of the integrator output and differentiator output is not within a threshold window. An indicator circuit is configured to generate an indicator signal indicating that the movable MEMS mirror has failed based on the comparison circuit indicating that the sum of the integrator output and differentiator output is not within the threshold window.

Abstract: A color calibration device for a laser scanning apparatus includes a compensation unit configured to electronically compensate for positional errors of the three-color laser source. The compensation unit includes an emitted light detector configured to measure a power of an emitted light beam. A calibration unit coupled to the emitted light detector has a controller configured to generate a quantity correction value for the three-color laser source. A laser source control element is configured to generate a control quantity for the three-color laser source, based on the quantity correction value. A dominant color detector is configured to detect any dominant color in the light beam being projected and actuate the controller for the dominant color.

Abstract: The present disclosure provides a system and method for controlling operation of a resonance MEMS mirror. The system and method includes activating either an in-plane or staggered MEMS mirror via sets of activation pulses applied to the MEMS mirror, detecting current at the MEMS mirror, generating a window for detecting a change in a direction of the current at the MEMS mirror, and terminating the window and the activation pulse if a change in the current direction is detected during the window. In some embodiments, two sets of activation pulses are applied to the MEMS mirror.

Abstract: Disclosed herein is a circuit for determining failure of a movable MEMS mirror. The circuit includes an integrator receiving an opening angle signal representing an opening angle of the movable MEMS mirror, and a differentiator receiving the opening angle signal. A summing circuit is configured to sum the integrator output and the differentiator output. A comparison circuit is configured to determine whether the sum of the integrator output and differentiator output is not within a threshold window. An indicator circuit is configured to generate an indicator signal indicating that the movable MEMS mirror has failed based on the comparison circuit indicating that the sum of the integrator output and differentiator output is not within the threshold window.

Abstract: A color calibration device for a laser scanning apparatus includes a compensation unit configured to electronically compensate for positional errors of the three-color laser source. The compensation unit includes an emitted light detector configured to measure a power of an emitted light beam. A calibration unit coupled to the emitted light detector has a controller configured to generate a quantity correction value for the three-color laser source. A laser source control element is configured to generate a control quantity for the three-color laser source, based on the quantity correction value. A dominant color detector is configured to detect any dominant color in the light beam being projected and actuate the controller for the dominant color.

Abstract: The method for controlling an angular position of a MEMS mirror, includes: applying a first driving moment to the MEMS mirror to generate a rotational scanning movement of the mirror; and, at a zooming instant, applying a second driving moment to the MEMS mirror, wherein the second driving moment is equal to the first driving moment plus an extra moment. The extra moment may be a DC offset. After a transient period of time from zooming instant, a third driving moment M2=k{dot over (?)}2t is applied. The first and third driving moment are variable linearly with time. The driving moments are applied to torsional springs of the mirror.

Abstract: A Micro Electro Mechanical Systems (MEMS) device includes a rotor having first rotor teeth and second rotor teeth formed in at least two layers of silicon-on-insulator (SOI) substrate. Each rotor tooth belonging to the first rotor teeth is formed in a first layer and each rotor tooth belonging of the second rotor teeth is formed in a second layer. A stator includes first stator teeth and second stator teeth formed in at least two layers of SOI substrate. Each stator tooth belonging to the first stator teeth is formed in a first layer and each stator tooth belonging to the second stator teeth is formed in a second layer.

Abstract: An intensity of radiation emitted from at least two laser diodes of a projecting apparatus is optimized by providing an offset distance between at least two focal points of the at least two laser diodes and providing a maximum value for radiation intensity emitted by each of the laser diodes, irrespective of simultaneous transmission by one of the laser diodes with another of the laser diodes. The intensity of the radiation emitted from each of the at least two laser diodes is adjusted such that an aggregated value of the radiation intensity emitted by all of the laser diodes within a predefined period of time may exceed a threshold value allowed for the maximum permissible exposure to radiation.

Abstract: A Micro Electro Mechanical Systems (MEMS) device includes a rotor having first rotor teeth and second rotor teeth formed in at least two layers of silicon-on-insulator (SOI) substrate. Each rotor tooth belonging to the first rotor teeth is formed in a first layer and each rotor tooth belonging of the second rotor teeth is formed in a second layer. A stator includes first stator teeth and second stator teeth formed in at least two layers of SOI substrate. Each stator tooth belonging to the first stator teeth is formed in a first layer and each stator tooth belonging to the second stator teeth is formed in a second layer.