Patents by Inventor Sasson Someth

Sasson Someth has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of fabricating an electrostatic chuck
    Patent number: 6557248
    Abstract: A method of fabricating an electrostatic member 33 for holding a substrate 45 in a process chamber 80 containing erosive process gas. The method comprises the steps of forming an electrostatic member 33 comprising an insulator or dielectric layer 35 covering an electrically conductive layer, and shaping the electrostatic member 33 to form a dielectric covered electrode and an electrical connector 55 attached to the dielectric covered electrode 50 to conduct charge to the dielectric covered electrode 50.
    Type: Grant
    Filed: May 29, 1998
    Date of Patent: May 6, 2003
    Assignee: Applied Materials Inc.
    Inventors: Shamouil Shamouilian, Manoocher Birang, John F. Cameron, Chandra Deshpandey, Alfred Goldspeil, Ron Northrup, Semyon Sherstinsky, Sasson Someth