Abstract: A pick-and-place device for picking a work-piece from a first location to a second location and having force measurement is disclosed. The pick-and-place device comprises: (a) a positive pressure chamber formed among a pick-and-place holder, a force measuring membrane and a cover, wherein a positive pressure is supplied to the positive pressure chamber via a pressure supply inlet provided on the pick-and-place holder, and thus the force measuring membrane is being preloaded; (b) a vacuum chamber formed among the pick-and-place holder, the force measuring membrane and a pick-up membrane, wherein a negative pressure is provided via a vacuum supply inlet provided on the pick-and-place holder, wherein the pick-and-place device provides a pressure difference between the work-piece and the pick-and-place device, enabling a pick-and-place capability.

Abstract: A pick-and-place device for picking a work-piece from a first location to a second location and having force measurement is disclosed. The pick-and-place device comprises: (a) a positive pressure chamber forming from a pick-and-place holder, a force measuring membrane and a cover, wherein a positive pressure is supplied to the positive pressure chamber via a pressure supply inlet provided on the pick- and-place holder, and thus the force measuring membrane is being preloaded; (b) a vacuum chamber forming from the pick-and-place holder, the force measuring membrane and a pick-up membrane, wherein a negative pressure is provided via a vacuum supply inlet provided on the pick-and-place holder, wherein the pick-and-place device provides a pressure difference between the work-piece and the pick-and-place device, enabling a pick-and-place capability.

Abstract: A positioning system having a flat base comprising (i) a X-axis assembly having a X-axis linear actuator means arranged orthogonal to the Y-axis; (ii) a Y-axis assembly having a pair of Y-axis linear actuator means mounted onto the flat base forming a H-configuration; (iii) a Z-axis assembly having an aerostatic bearing mechanism that floats on thin film of externally pressurized air on top of the flat base; and a ?-axis actuator anchored from the X-axis to drive the Z-axis assembly which carries a workpiece, wherein the Z-axis assembly is rotated with the rotary axis for the ?-axis perpendicular to the flat base.

Abstract: A positioning system having a flat base comprising (i) a X-axis assembly having a X-axis linear actuator means arranged orthogonal to the Y-axis; (ii) a Y-axis assembly having a pair of Y-axis linear actuator means mounted onto the flat base forming a H-configuration; (iii) a Z-axis assembly having an aerostatic bearing mechanism that floats on thin film of externally pressurized air on top of the flat base; and a ?-axis actuator anchored from the X-axis to drive the Z-axis assembly which carries a workpiece, wherein the Z-axis assembly is rotated with the rotary axis for the ?-axis perpendicular to the flat base.