Patents by Inventor Sathees Kannan Selvaraj

Sathees Kannan Selvaraj has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Multi-metal films, alternating film multilayers, formation methods and deposition system
    Patent number: 10214817
    Abstract: A deposition system can conduct ALD or CVD deposition and can switch between the deposition modes. The system is capable of depositing multi-metal films and multi-layer films of alternating ALD and CVD films. Reactant supplies can be bypassed with carrier gas flow to maintain pressure in a reactor and in reactor supply lines and purge reactants.
    Type: Grant
    Filed: October 15, 2014
    Date of Patent: February 26, 2019
    Assignee: The Board of Trustees of the University of Illinois
    Inventors: Christos G. Takoudis, Manish Singh, Sathees Kannan Selvaraj
  • MULTI-METAL FILMS, ALTERNATING FILM MULTILAYERS, FORMATION METHODS AND DEPOSITION SYSTEM
    Publication number: 20150104575
    Abstract: A deposition system can conduct ALD or CVD deposition and can switch between the deposition modes. The system is capable of depositing multi-metal films and multi-layer films of alternating ALD and CVD films. Reactant supplies can be bypassed with carrier gas flow to maintain pressure in a reactor and in reactor supply lines and purge reactants.
    Type: Application
    Filed: October 15, 2014
    Publication date: April 16, 2015
    Inventors: Christos G. Takoudis, Manish Singh, Sathees Kannan Selvaraj