Patents by Inventor Sathya Mani

Sathya Mani has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Hot edge ring with sloped upper surface
    Patent number: 8084375
    Abstract: A hot edge ring with extended lifetime comprises an annular body having a sloped upper surface. The hot edge ring includes a step underlying an outer edge of a semiconductor substrate supported in a plasma processing chamber wherein plasma is used to process the substrate. The step includes a vertical surface which surrounds the outer edge of the substrate and the sloped upper surface extends upwardly and outwardly from the upper periphery of the vertical surface.
    Type: Grant
    Filed: November 2, 2010
    Date of Patent: December 27, 2011
    Assignee: Lam Research Corporation
    Inventors: Akira Koshiishi, Sathya Mani, Gautam Bhattacharyya, Gregory R. Bettencourt, Sandy Chao
  • HOT EDGE RING WITH SLOPED UPPER SURFACE
    Publication number: 20110104884
    Abstract: A hot edge ring with extended lifetime comprises an annular body having a sloped upper surface. The hot edge ring includes a step underlying an outer edge of a semiconductor substrate supported in a plasma processing chamber wherein plasma is used to process the substrate. The step includes a vertical surface which surrounds the outer edge of the substrate and the sloped upper surface extends upwardly and outwardly from the upper periphery of the vertical surface.
    Type: Application
    Filed: November 2, 2010
    Publication date: May 5, 2011
    Applicant: Lam Research Corporation
    Inventors: Akira Koshiishi, Sathya Mani, Gautam Bhattacharyya, Gregory R. Bettencourt, Sandy Chao