Patents by Inventor Sathyendra K. Ghantasala

Sathyendra K. Ghantasala has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Processing chamber hardware fault detection using spectral radio frequency analysis
    Patent number: 10553397
    Abstract: A method of assigning faults to a processing chamber is described. Some embodiments include applying a radio frequency (RF) signal to a processing chamber to stimulate resonance in the chamber, measuring resonances of the applied RF signal in the chamber, extracting a fingerprint from the measured resonances, comparing the extracted fingerprint to a library of fingerprints, assigning a similarity index to combinations of the extracted fingerprint with at least one fingerprint in the fingerprint library, comparing each similarity index to a threshold, and if the similarity is greater than a threshold, then assigning a fault to the processing chamber using the library fingerprint.
    Type: Grant
    Filed: March 26, 2019
    Date of Patent: February 4, 2020
    Assignee: Applied Materials, Inc.
    Inventors: Sathyendra K. Ghantasala, Vijayakumar C. Venugopal, Hyun-Ho Doh
  • PROCESSING CHAMBER HARDWARE FAULT DETECTION USING SPECTRAL RADIO FREQUENCY ANALYSIS
    Publication number: 20190221401
    Abstract: A method of assigning faults to a processing chamber is described. Some embodiments include applying a radio frequency (RF) signal to a processing chamber to stimulate resonance in the chamber, measuring resonances of the applied RF signal in the chamber, extracting a fingerprint from the measured resonances, comparing the extracted fingerprint to a library of fingerprints, assigning a similarity index to combinations of the extracted fingerprint with at least one fingerprint in the fingerprint library, comparing each similarity index to a threshold, and if the similarity is greater than a threshold, then assigning a fault to the processing chamber using the library fingerprint.
    Type: Application
    Filed: March 26, 2019
    Publication date: July 18, 2019
    Inventors: Sathyendra K. Ghantasala, Vijayakumar C. Venugopal, Hyun-Ho Doh
  • Processing chamber hardware fault detection using spectral radio frequency analysis
    Patent number: 10283320
    Abstract: A method of assigning faults to a processing chamber is described. Some embodiments include applying a radio frequency (RF) signal to a processing chamber to stimulate resonance in the chamber, measuring resonances of the applied RF signal in the chamber, extracting a fingerprint from the measured resonances, comparing the extracted fingerprint to a library of fingerprints, assigning a similarity index to combinations of the extracted fingerprint with at least one fingerprint in the fingerprint library, comparing each similarity index to a threshold, and if the similarity is greater than a threshold, then assigning a fault to the processing chamber using the library fingerprint.
    Type: Grant
    Filed: November 11, 2016
    Date of Patent: May 7, 2019
    Assignee: Applied Materials, Inc.
    Inventors: Sathyendra K. Ghantasala, Vijayakumar C. Venugopal, Hyun-Ho Doh
  • PROCESSING CHAMBER HARDWARE FAULT DETECTION USING SPECTRAL RADIO FREQUENCY ANALYSIS
    Publication number: 20180138015
    Abstract: A method of assigning faults to a processing chamber is described. Some embodiments include applying a radio frequency (RF) signal to a processing chamber to stimulate resonance in the chamber, measuring resonances of the applied RF signal in the chamber, extracting a fingerprint from the measured resonances, comparing the extracted fingerprint to a library of fingerprints, assigning a similarity index to combinations of the extracted fingerprint with at least one fingerprint in the fingerprint library, comparing each similarity index to a threshold, and if the similarity is greater than a threshold, then assigning a fault to the processing chamber using the library fingerprint.
    Type: Application
    Filed: November 11, 2016
    Publication date: May 17, 2018
    Inventors: Sathyendra K. Ghantasala, Vijayakumar C. Venugopal, Hyun-Ho Doh