Patents by Inventor Satinderpall Pannu
Satinderpall Pannu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7023604Abstract: A beam steering module comprised of a mirror stack array in close proximity to a collimator array controllably steers photons along two axis and in a direction substantially less than 90 degrees to the collimator orientation. Several configurations of the module are described using single and double axis mirror rotation and relay optics. Optical telecommunications switches are shown using modules coupled to each other along flat and curved surfaces, with and without use of fold mirror and enabling a plurality of configuration options including photodetector optical power monitoring schemes that require no external power taps.Type: GrantFiled: March 17, 2001Date of Patent: April 4, 2006Assignee: Analog Devices, Inc.Inventors: Behrang Behin, Robert Conant, Michael J. Daneman, David Horsley, Meng-Hsiung Kiang, David Lerner, Satinderpall Pannu
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Patent number: 6819822Abstract: A two-dimensional scanner consists of a rotatable gimbal structure with vertical electrostatic comb-drive actuators and sensors. The scanner's two axes of rotation may be controlled independently by activating two sets of vertical comb-drive actuators. The first set of vertical comb-drive actuator is positioned in between a outer frame of the gimbal structure and the base, and the second set of vertical comb-drive actuator is positioned in between the inner part of the gimbal structure and the outer frame of the gimbal structure. The inner part of the gimbal structure may include a reflective surface, and the device may be used as a mirror. Furthermore, the capacitance of the vertical comb-drives may be measured to monitor the angular position of the mirror, and the capacitive position-monitoring signal may be used to implement closed-loop feedback control of the mirror angle. The two-dimensional scanner may be fabricated in a semiconductor process.Type: GrantFiled: December 28, 2000Date of Patent: November 16, 2004Assignee: Analog Devices, Inc.Inventors: Behrang Behin, Michael J. Daneman, Meng-Hsiung Kiang, Kam-Yin Lau, Satinderpall Pannu
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Patent number: 6744173Abstract: A multi-layer vertical comb-drive actuator includes a first comb structure having a plurality of first comb fingers and a second comb structure having a plurality of second comb fingers, wherein the first and second comb fingers are substantially interdigitated. The first and second comb fingers may include two or more stacked conductive layers electrically isolated from each other by an insulating layer or an air gap. Alternatively, either the first or second comb fingers may include only one conductive layer. An application of a voltage between the first and second comb fingers causes the second comb structure to move relative to the first comb structure. The present invention includes a 2D-gimble configuration to rotate a movable element along two axis.Type: GrantFiled: March 14, 2001Date of Patent: June 1, 2004Assignee: Analog Devices, Inc.Inventors: Behrang Behin, Satinderpall Pannu
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Patent number: 6629461Abstract: A method for rotating a combdriven device about an axis uses applied bias force along with applied voltage between first and second comb fingers to controllably rotate the device about one or two axis. One mode of the present invention includes measuring the position of a rotating element and providing feedback to control the angular position thereof by changing bias force and/or drive voltage. The present invention can be employed with prior-art staggered combdrives, single layer self-aligned combdriven devices, and in a broad range of applications in optical telecommunication switching, video, biomedical, inertial sensors, and in storage magnetic disk drives.Type: GrantFiled: March 14, 2001Date of Patent: October 7, 2003Assignee: Onix Microsystems, Inc.Inventors: Behrang Behin, Satinderpall Pannu
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Patent number: 6612029Abstract: A method of fabricating multi-layer vertical comb-drive actuator that includes a first comb structure having a plurality of first comb fingers and a second comb structure having a plurality of second comb fingers, wherein the first and second comb fingers are substantially interdigitated. The present invention includes masking and etching of a structure that contains these multiple layers, wherein the first and second comb fingers are simultaneously fabricated. The first and second comb fingers may include two or more stacked conductive layers electrically isolated from each other by an insulating layer or an air gap. Alternatively, either the first or second comb fingers may include only one conductive layer.Type: GrantFiled: March 14, 2001Date of Patent: September 2, 2003Assignee: Onix MicrosystemsInventors: Behrang Behin, Satinderpall Pannu
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Patent number: 6593677Abstract: Rotating devices including actuators and position sensors that employ combdrives are described. One design of a combdrive fabricated from a single layer is provided such that, in a nominal state, the two sets of comb fingers are substantially interdigitated according to a predetermined engagement. A rotating element may be attached to a rotatable flexure disposed along an axis and coupled to the comb fingers along with a biasing element attached to the rotating element to cause the comb fingers along with the rotating element to undergo a controlled angular displacement from the initial engagement and in response to feedback from sensing the position of the movable or rotating element. A voltage may be applied between comb fingers to cause the rotating element to undergo further rotation about the axis in a predetermined manner.Type: GrantFiled: March 14, 2001Date of Patent: July 15, 2003Assignee: Onix Microsystems, Inc.Inventors: Behrang Behin, Satinderpall Pannu
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Publication number: 20020097478Abstract: A beam steering module comprised of a mirror stack array in close proximity to a collimator array controllably steers photons along two axis and in a direction substantially less than 90 degrees to the collimator orientation. Several configurations of the module are described using single and double axis mirror rotation and relay optics. Optical telecommunications switches are shown using modules coupled to each other along flat and curved surfaces, with and without use of fold mirror and enabling a plurality of configuration options including photodetector optical power monitoring schemes that require no external power taps.Type: ApplicationFiled: March 17, 2001Publication date: July 25, 2002Inventors: Behrang Behin, Robert Conant, Michael J. Daneman, David Horsley, Meng-Hsiung Kiang, David Lerner, Satinderpall Pannu
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Publication number: 20020026831Abstract: A method for rotating a combdriven device about an axis uses applied bias force along with applied voltage between first and second comb fingers to controllably rotate the device about one or two axis. One mode of the present invention includes measuring the position of a rotating element and providing feedback to control the angular position thereof by changing bias force and/or drive voltage. The present invention can be employed with prior-art staggered combdrives, single layer self-aligned combdriven devices, and in a broad range of applications in optical telecommunication switching, video, biomedical, inertial sensors, and in storage magnetic disk drives.Type: ApplicationFiled: March 14, 2001Publication date: March 7, 2002Inventors: Behrang Behin, Satinderpall Pannu
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Publication number: 20020005976Abstract: A multi-layer vertical comb-drive actuator includes a first comb structure having a plurality of first comb fingers and a second comb structure having a plurality of second comb fingers, wherein the first and second comb fingers are substantially interdigitated. The first and second comb fingers may include two or more stacked conductive layers electrically isolated from each other by an insulating layer or an air gap. Alternatively, either the first or second comb fingers may include only one conductive layer. An application of a voltage between the first and second comb fingers causes the second comb structure to move relative to the first comb structure. The present invention includes a 2D-gimble configuration to rotate a movable element along two axis.Type: ApplicationFiled: March 14, 2001Publication date: January 17, 2002Inventors: Behrang Behin, Satinderpall Pannu
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Publication number: 20010051014Abstract: Optical switches based on combdriven MEMs rotating devices including actuators and position sensors. The present invention includes an embodiment that uses rotating elements attached to rotatable flexure disposed along an axis and coupled to the comb fingers with a biasing element coupled to the rotating element causing the rotating element to undergo a controlled angular displacement from the initial engagement and in response to feedback from sensing the position of the movable or rotating element. A voltage applied between comb fingers may cause the rotating element to undergo further rotation about the axis in a predetermined manner to deflect and switch an optical signal. The switches of the present invention can be employed with prior-art staggered combdrives and single layer self-aligned combdriven devices.Type: ApplicationFiled: March 14, 2001Publication date: December 13, 2001Inventors: Behrang Behin, Satinderpall Pannu
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Publication number: 20010050801Abstract: Rotating devices including actuators and position sensors that employ combdrives are described. One design of a combdrive fabricated from a single layer is provided such that, in a nominal state, the two sets of comb fingers are substantially interdigitated according to a predetermined engagement. A rotating element may be attached to a rotatable flexure disposed along an axis and coupled to the comb fingers along with a biasing element attached to the rotating element to cause the comb fingers along with the rotating element to undergo a controlled angular displacement from the initial engagement and in response to feedback from sensing the position of the movable or rotating element. A voltage may be applied between comb fingers to cause the rotating element to undergo further rotation about the axis in a predetermined manner.Type: ApplicationFiled: March 14, 2001Publication date: December 13, 2001Applicant: ONIX MICROSYSTEMS, INC.Inventors: Behrang Behin, Satinderpall Pannu
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Patent number: 6330102Abstract: A beam steering module and switching system. The steering module is composed of a N×M array of single axis mirrors able to rotate about a particular axis (X-axis), a second N×M array of single axis mirrors able to rotate about an axis orthogonal to that of the first N×M array of mirrors (Y-axis), and a relay lens designed to image the first mirror array onto the second mirror array such that the beam angle may be controlled in both the X and Y-axis by adjusting the angle of the appropriate mirrors in the X and Y mirror arrays. Two steering modules may be combined to form a switching system. With two such steering modules, it is possible to completely determine, at the plane of the output fiber array, the position and angle of an optical beam emerging from any of the input fibers.Type: GrantFiled: March 25, 2000Date of Patent: December 11, 2001Assignee: Onix MicrosystemsInventors: Michael J. Daneman, Behrang Behin, Satinderpall Pannu
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Publication number: 20010048784Abstract: A two-dimensional scanner consists of a rotatable gimbal structure with vertical electrostatic comb-drive actuators and sensors. The scanner's two axes of rotation may be controlled independently by activating two sets of vertical comb-drive actuators. The first set of vertical comb-drive actuator is positioned in between a outer frame of the gimbal structure and the base, and the second set of vertical comb-drive actuator is positioned in between the inner part of the gimbal structure and the outer frame of the gimbal structure. The inner part of the gimbal structure may include a reflective surface, and the device may be used as a mirror. Furthermore, the capacitance of the vertical comb-drives may be measured to monitor the angular position of the mirror, and the capacitive position-monitoring signal may be used to implement closed-loop feedback control of the mirror angle. The two-dimensional scanner may be fabricated in a semiconductor process.Type: ApplicationFiled: December 28, 2000Publication date: December 6, 2001Inventors: Behrang Behin, Michael J. Daneman, Meng-Hsiung Kiang, Kam-Yin Lau, Satinderpall Pannu
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Publication number: 20010040419Abstract: A method for rotating a combdriven device uses application of bias force to controllably rotate the device about one or two axis in response to position measurements of the rotating element. The present invention can be employed with prior-art staggered combdrives, single layer self-aligned combdriven devices, and in a broad range of applications in optical telecommunication switching, video, biomedical, inertial sensors, and in storage magnetic disk drives.Type: ApplicationFiled: March 14, 2001Publication date: November 15, 2001Inventors: Behrang Behin, Satinderpall Pannu
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Publication number: 20010034938Abstract: A method of fabricating multi-layer vertical comb-drive actuator that includes a first comb structure having a plurality of first comb fingers and a second comb structure having a plurality of second comb fingers, wherein the first and second comb fingers are substantially interdigitated. The present invention includes masking and etching of a structure that contains these multiple layers, wherein the first and second comb fingers are simultaneously fabricated. The first and second comb fingers may include two or more stacked conductive layers electrically isolated from each other by an insulating layer or an air gap. Alternatively, either the first or second comb fingers may include only one conductive layer.Type: ApplicationFiled: March 14, 2001Publication date: November 1, 2001Inventors: Behrang Behin, Satinderpall Pannu