Patents by Inventor Satish K. Gupta

Satish K. Gupta has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Cyclosilazane polymers as dielectric films in integrated circuit fabrication technology
    Patent number: 4719125
    Abstract: An improved method is presented for the deposition of dielectric films in the fabrication of integrated circuits (ICs), wherein a solution of polymers derived from cyclosilazanes is employed to deposit dielectric films on semiconductor substrates by the spin-on technique. These spin-on films planarize (smooth out) underlying substrate topography and therefore are especially advantageous in multilevel metallization processes where they allow a highly uniform and continuous deposition of a subsequent layer of metallization resulting in improved yield and reliability of ICs.
    Type: Grant
    Filed: November 3, 1986
    Date of Patent: January 12, 1988
    Assignee: Allied Corporation
    Inventors: Louis G. Anello, Satish K. Gupta, Stephen W. Kirtley, George S. Wooster, Ralph L. DePrenda