Patents by Inventor Satomi YAMAZAKI

Satomi YAMAZAKI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240006184
    Abstract: According to some embodiments of the present disclosure, a gas line whose gas flow rate is to be edited by a user can be confirmed. There is provided a technique that includes: (a) displaying, on a recipe edit screen, a parameter setting region configured to set control parameters including a gas flow rate of a flow rate controller and a gas pattern screen configured to set an opening/closing state of a valve; (b) editing the recipe on the recipe edit screen; and (c) processing a substrate by performing the recipe edited in (b). When the gas flow rate of the flow rate controller is set on the parameter setting region, a flow rate controller on the gas pattern screen in association with the flow rate controller whose gas flow rate is set on the parameter setting region is clearly specified.
    Type: Application
    Filed: September 19, 2023
    Publication date: January 4, 2024
    Applicant: Kokusai Electric Corporation
    Inventors: Junichi KAWASAKI, Shinichiro MORI, Yasuhiro JOHO, Satomi YAMAZAKI
  • Publication number: 20220375331
    Abstract: According to one aspect of a technique the present disclosure, there is provided a processing apparatus including: an apparatus controller including a memory storing apparatus data containing monitor data containing sensor information and an alarm indicating a failure detected based on the sensor information and an alarm analysis table containing analysis items. The apparatus controller is capable of outputting the alarm containing an alarm ID for specifying a type and an occurrence time of the alarm; specifying candidates of the analysis items from the alarm ID; acquiring monitor data corresponding to the candidates; determining a rank of the cause of the alarm according to a difference between monitor data at the occurrence time and a predetermined threshold value; and displaying a relationship between the monitor data and the threshold value. The display screen displays an occurrence history of the alarm and history of acquiring the monitor data.
    Type: Application
    Filed: August 5, 2022
    Publication date: November 24, 2022
    Inventors: Masanori OKUNO, Junichi KAWASAKI, Shinichiro MORI, Yasuhiro JOHO, Satomi YAMAZAKI