Patents by Inventor Satoru Kariya

Satoru Kariya has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ceramic heater for semiconductor manufacturing and inspecting devices
    Publication number: 20040026403
    Abstract: An object of the present invention is to provide a ceramic heater for a semiconductor-producing/examining device which has a short temperature dropping time and can be rapidly cooled. The present invention is a ceramic heater for a semiconductor-producing/examining device comprising a resistance heating element on a surface thereof, wherein the resistance heating element has a surface roughness Ra according to JIS B 0601 of 0.01 &mgr;m or more.
    Type: Application
    Filed: July 29, 2003
    Publication date: February 12, 2004
    Inventors: Satoru Kariya, Yasutaka Ito
  • Semiconductor manufacturing/testing ceramic heater
    Publication number: 20030062358
    Abstract: An object of the present invention is to provide a ceramic heater for a semiconductor producing/examining device wherein a scattering in the resistance value of its resistance heating element is hardly generated and its heating face is excellent in temperature evenness. The present invention is a ceramic heater for a semiconductor producing/examining device having a resistance heating element formed on a surface of a ceramic substrate, wherein a gutter is formed along the direction of current flowing through the resistance heating element.
    Type: Application
    Filed: June 26, 2002
    Publication date: April 3, 2003
    Inventors: Atsushi Ito, Satoru Kariya
  • Ceramic heater
    Publication number: 20020195441
    Abstract: In a ceramic heater comprising a heating body formed on a surface of a ceramic substrate, the heating body is made of a non-sintering type metal foil or an electrically conductive ceramic thin film, and the metal foil or electrically conductive ceramic thin film is adhered to the surface of the substrate through a heat-resistant resin layer or the like. The ceramic heater is less in the scattering of resistance resulted from the quality of the heating body and is possible to accurately and rapidly conduct temperature control.
    Type: Application
    Filed: August 5, 2002
    Publication date: December 26, 2002
    Applicant: IBIDEN CO., LTD.
    Inventor: Satoru Kariya
  • Semiconductor manufacturing/testing ceramic heater, production method for the ceramic heater and production system for the ceramic heater
    Publication number: 20020179592
    Abstract: An object of the present invention is to provide a ceramic heater for a semiconductor producing/examining device wherein resistance heating elements which do not cause a short circuit and the like, are relatively inexpensive and have a precise pattern can be formed. The present invention is a ceramic heater for a semiconductor-producing/examining device comprising a ceramic substrate and a resistance heating element formed on the ceramic substrate, wherein trimming is performed on said resistance heating element.
    Type: Application
    Filed: June 24, 2002
    Publication date: December 5, 2002
    Inventors: Yasuji Hiramatsu, Yasutaka Ito, Satoru Kariya
  • Ceramic heater
    Patent number: 6452137
    Abstract: In a ceramic heater comprising a heating body formed on a surface of a ceramic substrate, the heating body is made of a non-sintering type metal foil or an electrically conductive ceramic thin film, and the metal foil or electrically conductive ceramic thin film is adhered to the surface of the substrate through a heat-resistant resin layer or the like. The ceramic heater is less in the scattering of resistance resulted from the quality of the heating body and is possible to accurately and rapidly conduct temperature control.
    Type: Grant
    Filed: April 23, 2001
    Date of Patent: September 17, 2002
    Assignee: Ibiden Co., Ltd.
    Inventor: Satoru Kariya