Abstract: The present invention relates to a polishing apparatus and a polishing method for polishing a flat portion of a substrate, such as a wafer. The polishing apparatus (100) includes: a substrate holder configured to hold a substrate (W) and rotate the substrate W; a polishing-tape feeding mechanism (141) configured to advance a polishing tape (3) in its longitudinal direction; and at least one polishing head (10) arranged near a flat portion of the substrate (W), wherein the polishing head (10) has a fluid pressing structure (12) configured to press the polishing tape (3) with fluid against the flat portion of the substrate, and the fluid pressing structure (12) has a fluid supply port (13) arranged so as to face a back surface of the polishing tape (3).

Abstract: A workpiece processing system (1) includes a transfer robot (3), a control device (4) controlling operation of the transfer robot (3), and an operating part (5) performing a teaching operation to the transfer robot (3). The control device (4) has an approach point setter (6) setting in advance an approach point as a reference point for the transfer robot (3) to start operation to a workpiece processing device, a first program generator (7) generating a first program defining the operation of the transfer robot (3) from an operational zero point for the transfer robot (3) to the approach point, a second program generator (8) generating a second program defining the operation of the transfer robot (3) after the approach point based on the teaching operation, and a robot controller (9) controlling the operation of the transfer robot (3) in accordance with the first program and the second program.

Abstract: A workpiece processing system (1) includes a transfer robot (3), a control device (4) controlling operation of the transfer robot (3), and an operating part (5) performing a teaching operation to the transfer robot (3). The control device (4) has an approach point setter (6) setting in advance an approach point as a reference point for the transfer robot (3) to start operation to a workpiece processing device, a first program generator (7) generating a first program defining the operation of the transfer robot (3) from an operational zero point for the transfer robot (3) to the approach point, a second program generator (8) generating a second program defining the operation of the transfer robot (3) after the approach point based on the teaching operation, and a robot controller (9) controlling the operation of the transfer robot (3) in accordance with the first program and the second program.

Abstract: A film formation apparatus is configured so as to be equipped with: a film-forming chamber for forming a thin film using plasma on a substrate at a film formation position; an abnormal discharge-detecting section for detecting an abnormal discharge of the plasma; an imaging device for imaging abnormal plasma, which is the plasma when an abnormal discharge is detected, or an abnormal substrate surface, which is the substrate surface on which a thin film is formed when an abnormal discharge is detected; and a storage unit for storing the images taken by the imaging device.

Abstract: A power transmitting apparatus can include a clutch housing, a plurality of driving and driven clutch plates, a clutch member, a pressure member, an intermediate member, a plurality of urging devices, and a back-torque limiting cam. The power transmitting apparatus can further include an urging force cut-off device for cutting-off the urging force applied to the pressure member from particular urging devices of the plurality of urging devices by separating the inner ends of the particular urging devices from the pressure member when the intermediate member is moved toward the pressure member by the action of the back-torque limiting cam.

Abstract: A power transmitting apparatus can include a clutch housing, a plurality of driving and driven clutch plates, a clutch member, a pressure member, an intermediate member, a plurality of urging devices, and a back-torque limiting cam. The power transmitting apparatus can further include an urging force cut-off device for cutting-off the urging force applied to the pressure member from particular urging devices of the plurality of urging devices by separating the inner ends of the particular urging devices from the pressure member when the intermediate member is moved toward the pressure member by the action of the back-torque limiting cam.

Abstract: A method for manufacturing a power transmitting apparatus by molding both the pressure-contact assist cam and back-torque limiting cam even though either one of the pressure-contact assist cam and back-torque limiting cam is molded as a reverse-draft surface. The power transmitting apparatus has a clutch housing (2) and a clutch member (4) connected to an output member (3). A plurality of driven clutch plates (7) alternately is arranged between the driving clutch plates (6) of the clutch housing. The pressure plate (5) and the clutch member (4) are, respectively, formed with through windows (5c) and (4c) at positions corresponding to the pressure-contact assist cams (4aa) and (5ba) and the back-torque limiting cams (4ab) and (5bb) to form reverse-draft surfaces of the pressure-contact assist cams (4aa) and (5ba) and the back-torque limiting cams (4ab) and (5bb) by inserting pin-shaped cores into the windows (5c) and (4c).

Abstract: A power transmitting apparatus has a clutch housing (2). A clutch member (4), connected to an output member (3), has a plurality of driven clutch plates (7) alternately arranged between driving clutch plates (6) of the clutch housing (2). A rotational force, inputted to the input member (1), can be transmitted to or cut-off from the output member (3) via pressure-contact or release between the driving clutch plates (6) and driven clutch plates (7). Pressure-contact assist cams and back-torque limiting cams are formed on a pressure plate 5 and the clutch member 4. The gradient angle (?2) of the back-torque limiting cams is formed larger than the gradient angle (?1) of the pressure-contact assisting cams.

Abstract: A power transmitting apparatus which can reduce the number of parts in the apparatus and simplify the structure of the apparatus and thus reduce the manufacturing cost of the apparatus as well as reduce the size of the apparatus when compared with its torque transmitting capacity. The apparatus has a clutch housing (2), a clutch member (4), a pressure plate (5), stopper portions (5b) each fitting in a recess (4a) formed on the inner peripheral wall of the clutch member (4) and limiting the rotation of the pressure plate (5).

Abstract: A power transmitting apparatus has a clutch housing (2). A clutch member (4), connected to an output member (3), has a plurality of driven clutch plates (7) alternately arranged between driving clutch plates (6) of the clutch housing (2). A rotational force, inputted to the input member (1), can be transmitted to or cut-off from the output member (3) via pressure-contact or release between the driving clutch plates (6) and driven clutch plates (7). Pressure-contact assist cams and back-torque limiting cams are formed on a pressure plate 5 and the clutch member 4. The gradient angle (?2) of the back-torque limiting cams is formed larger than the gradient angle (?1) of the pressure-contact assisting cams.

Abstract: A method for manufacturing a power transmitting apparatus by molding both the pressure-contact assist cam and back-torque limiting cam even though either one of the pressure-contact assist cam and back-torque limiting cam is molded as a reverse-draft surface. The power transmitting apparatus has a clutch housing (2) and a clutch member (4) connected to an output member (3). A plurality of driven clutch plates (7) alternately is arranged between the driving clutch plates (6) of the clutch housing. The pressure plate (5) and the clutch member (4) are, respectively, formed with through windows (5c) and (4c) at positions corresponding to the pressure-contact assist cams (4aa) and (5ba) and the back-torque limiting cams (4ab) and (5bb) to form reverse-draft surfaces of the pressure-contact assist cams (4aa) and (5ba) and the back-torque limiting cams (4ab) and (5bb) by inserting pin-shaped cores into the windows (5c) and (4c).

Abstract: A power transmitting apparatus which can reduce the number of parts in the apparatus and simplify the structure of the apparatus and thus reduce the manufacturing cost of the apparatus as well as reduce the size of the apparatus when compared with its torque transmitting capacity. The apparatus has a clutch housing (2), a clutch member (4), a pressure plate (5), stopper portions (5b) each fitting in a recess (4a) formed on the inner peripheral wall of the clutch member (4) and limiting the rotation of the pressure plate (5).