Abstract: A substrate processing apparatus includes: a substrate holder to vertically load a plurality of substrates in multiple stages with an interval therebetween and including a plurality of partition plates vertically partitioning a region where the plurality of substrates are loaded; a process chamber to receive the substrate holder therein; protrusions protruding inward toward the outer circumferential surfaces of the partition plates from an inner circumferential wall surface within the process chamber, which faces the outer circumferential surfaces of the partition plates, to form clearances between inner circumferential surfaces formed on the protruding tip ends of the protrusions and the outer circumferential surfaces of the partition plates; and a gas supply part to supply inert gas into the clearances, which are formed between the inner circumferential surfaces of the protrusions and the outer circumferential surfaces of the partition plates, to form positive-pressure sections subjected to a pressure highe

Abstract: A mixed gas multiple line supply system includes a flow splitter connected to a common mixed gas supplying passage, the flow splitter configured to split a mixed gas into a plurality of supply lines while adjusting a ratio of flow rates in the plurality of supply lines, and an least one injector including a gas introducing port and a gas discharge hole for each of a plurality of regions in the processing container and configured to supply the mixed gas to each of the plurality of regions. The plurality of supply lines of the flow splitter are connected in one-to-one correspondence to the respective gas introducing ports provided for the plurality of regions in the processing container.

Abstract: There is provided a pressure measuring device including: a first pressure gauge connected to a processing chamber configured to process a process target and configured to measure an internal pressure of the processing chamber when the process target is being processed; a second pressure gauge connected to the processing chamber; and a first switching valve configured to disconnect the second pressure gauge from the processing chamber when the process target is being processed inside the processing chamber.

Abstract: A substrate processing apparatus includes: a substrate holder to vertically load a plurality of substrates in multiple stages with an interval therebetween and including a plurality of partition plates vertically partitioning a region where the plurality of substrates are loaded; a process chamber to receive the substrate holder therein; protrusions protruding inward toward the outer circumferential surfaces of the partition plates from an inner circumferential wall surface within the process chamber, which faces the outer circumferential surfaces of the partition plates, to form clearances between inner circumferential surfaces formed on the protruding tip ends of the protrusions and the outer circumferential surfaces of the partition plates; and a gas supply part to supply inert gas into the clearances, which are formed between the inner circumferential surfaces of the protrusions and the outer circumferential surfaces of the partition plates, to form positive-pressure sections subjected to a pressure highe

Abstract: There is provided a pressure measuring device including: a first pressure gauge connected to a processing chamber configured to process a process target and configured to measure an internal pressure of the processing chamber when the process target is being processed; a second pressure gauge connected to the processing chamber; and a first switching valve configured to disconnect the second pressure gauge from the processing chamber when the process target is being processed inside the processing chamber.

Abstract: A mixed gas multiple line supply system includes a flow splitter connected to a common mixed gas supplying passage, the flow splitter configured to split a mixed gas into a plurality of supply lines while adjusting a ratio of flow rates in the plurality of supply lines, and an least one injector including a gas introducing port and a gas discharge hole for each of a plurality of regions in the processing container and configured to supply the mixed gas to each of the plurality of regions. The plurality of supply lines of the flow splitter are connected in one-to-one correspondence to the respective gas introducing ports provided for the plurality of regions in the processing container.

Abstract: There is provided a vaporization raw material supplying device, including; a single vaporization raw material producing part configured to vaporize a raw material to produce a vaporization raw material; a plurality of branch pipes connected to the single vaporization raw material producing part and configured to distribute the produced vaporization raw material in multiple channels; and a plurality of mass flow controllers installed respectively in the plurality of branch pipes.

Abstract: A metal contamination preventing method to be performed prior to using a metal component coated with a passivation film formed of chromium oxide includes generating chromium nitrate by supplying a nitric acid to the passivation film covering a surface of the metal component, and reacting the chromium oxide with the nitric acid and removing chromium from the passivation film by evaporating the chromium nitrate.

Abstract: There is provided a pressure measuring instrument including: a detecting unit including the reference pressure chamber therein and formed in a cylindrical shape, the diaphragm being disposed inside the detecting unit; a communicating unit for providing communication between the diaphragm and the measurement pressure chamber, and formed in a circular tube shape having an inner diameter smaller than an inner diameter of the detecting unit; and an annular flow-path forming unit disposed between the detecting unit and the communicating unit, and configured to form a substantially annular path. The communicating unit introduces a gas of the measurement pressure chamber into the substantially annular path. The annular flow-path forming unit allows the gas introduced from the communicating unit to pass through the substantially annular path and to supply the passing gas to a side surface of the diaphragm.

Abstract: There is provided a pressure measuring instrument including: a detecting unit including the reference pressure chamber therein and formed in a cylindrical shape, the diaphragm being disposed inside the detecting unit; a communicating unit for providing communication between the diaphragm and the measurement pressure chamber, and formed in a circular tube shape having an inner diameter smaller than an inner diameter of the detecting unit; and an annular flow-path forming unit disposed between the detecting unit and the communicating unit, and configured to form a substantially annular path. The communicating unit introduces a gas of the measurement pressure chamber into the substantially annular path. The annular flow-path forming unit allows the gas introduced from the communicating unit to pass through the substantially annular path and to supply the passing gas to a side surface of the diaphragm.

Abstract: An exhaust trap includes an inlet port configured to introduce an exhaust gas discharged from a substrate processing apparatus, an outlet port configured to discharge the exhaust gas introduced from the inlet port, and a plurality of baffle plates arranged therebetween intersecting with a flow direction of the exhaust gas, each of the baffle plates including one or more first holes having a first aperture dimension and a plurality of second holes having a second aperture dimension smaller than the first aperture dimension, wherein the first hole of one of the baffle plates and the first hole of another baffle plate adjacent to said one of the baffle plates are arranged out of alignment with respect to the flow direction of the exhaust gas, and an interval between the two baffle plates adjacent to each other being 0.5 to 2 times as large as the second aperture dimension.

Abstract: The present invention provides a composition for detecting an object substance (X). This detection composition contains a gel (Y). The gel (Y) contains a colorable aqueous solution (A) that can be colored upon contact with the object substance (X), and a crosslinked polymer (B). This composition is preferably used to evaluate packaging materials.

Abstract: The present invention provides a composition for detecting an object substance (X). This detection composition contains a gel (Y). The gel (Y) contains a colorable aqueous solution (A) that can be colored upon contact with the object substance (X), and a crosslinked polymer (B). This composition is preferably used to evaluate packaging materials.