Patents by Inventor Satoru Kotou

Satoru Kotou has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for cleaning semiconductor wafers
    Patent number: 5217925
    Abstract: In an apparatus and a method for cleaning semiconductor wafers, an exhaust chamber having a sub-outlet slows down the flow of frozen micro-particles and thus prevents rebounding of the particles toward the wafer. Therefore, dust or the like is kept away from a cleaned semiconductor wafer so that the semiconductor wafers are cleaned more thoroughly.
    Type: Grant
    Filed: November 27, 1991
    Date of Patent: June 8, 1993
    Assignees: Taiyo Sanso Co., Ltd., Mitsubishi Denki Kabushiki Kaisha
    Inventors: Mitsuhiro Ogawa, Toshiki Ouno, Taizou Ejima, Satoru Kotou