Abstract: An adjustment method includes: acquiring reference distribution data that is data on a distribution of an ion flux that occurs between plasma generated in a first chamber and a substrate placed at a first substrate support disposed in the first chamber in a first plasma processing apparatus including the first chamber and the first substrate support; acquiring distribution data that is data on a distribution of an ion flux that occurs between plasma generated in a second chamber and a substrate placed at a second substrate support disposed in the second chamber in a second plasma processing apparatus including the second chamber and the second substrate support; and adjusting an element capable of adjusting the ion flux in the second plasma processing apparatus based on the distribution data acquired in the second plasma processing apparatus and the reference distribution data acquired in the first plasma processing apparatus.

Abstract: A battery manufacturing system manufactures a battery material by sequentially subjecting a predetermined raw material to a plurality of different processing steps and includes a plurality of processing blocks and a connecting block. The processing blocks each include a processing space which is cut off from outside air, a receiving port which receives a predetermined material into the processing space, and a sending port which sends out a product having been produced by subjecting the material received from the receiving port to predetermined processing. A connecting block includes at least an intermediate unit which cuts off a space from the sending port included in the processing block on an upstream side to the receiving port included in the processing block on a downstream side from outside air and which is flexible enough to follow a change in relative positions of the sending port and the receiving port.

Abstract: A technology for reducing variation in an ion flux distribution will be provided. There is provided a plasma processing method for performing plasma processing in a plasma processing apparatus including a chamber and a substrate support disposed in the chamber, the plasma processing performed on a substrate placed at the substrate support by generating plasma in the chamber. The plasma processing method includes: (a) the step of storing, in memory, first distribution data that is data relating to a distribution of an ion flux that occurs between the plasma generated in the chamber and a first substrate placed at the substrate support; (b-a) the step of placing a second substrate at the substrate support; and (b-b) a plasma processing step of generating the plasma in the chamber based on the first distribution data to perform the plasma processing on the second substrate.

Abstract: An image forming apparatus includes: a recording head that ejects droplets onto a recording medium; an endless belt that conveys the recording medium toward a position where an image is to be formed on the recording medium by the recording head; a support plate that supports the endless belt; and a suction device which is located on an opposite side of the recording head relative to the endless belt and sucks the recording medium together with air to attract the recording medium to a surface of the endless belt. The support plate includes an air inlet and an air vent. The air sucked by the suction device passes through the air inlet from a side of the recording head toward the suction device. The air inside the suction device passes through the air vent from the suction device toward the endless belt.

Abstract: a negative electrode for a lithium ion cell battery capable of increasing a cell battery capacity and improving cell battery characteristics such as cycle characteristics is provided. A negative electrode mixture layer 1M including a negative electrode active material, a binder, and hydrophobized cellulose is formed as described below. The negative electrode active material includes nano-Si, the binder is an organic solvent-based binder (polyimide or polyvinylidene fluoride), and the hydrophobized cellulose results from substitution of a part of hydrophilic groups of cellulose by a hydrophobic group. When the organic solvent-based binder is used as described above, reaction between water and Si can be prevented, and the electrode characteristics can be improved. In a general technique, the addition amount of the organic solvent-based binder needs to be increased because of use of the Nano-Si, and therefore, this decreases the cell battery capacity and the cycle characteristics (cell battery life).

Abstract: A method of manufacturing an all-solid-state battery and an apparatus for manufacturing the same are provided. The method of manufacturing the all-solid-state battery includes: (a) a step of forming a non-woven fabric having a fiber made of a resin; (b) a step of applying a slurry containing solid electrolyte particles onto the non-woven fabric; (c) a step of drying the slurry on the non-woven fabric by a heater; (d) a step of pressurizing the slurry on the non-woven fabric by a roller; (e) a step of forming a positive electrode member on one surface of the solid electrolyte membrane; and (f) a step of forming a negative electrode member on the other surface of the solid electrolyte membrane. The step (a) is a step of forming the non-woven fabric by making a resin containing a polar filler fibrous by a laser electrospinning method.

Abstract: In a reaction apparatus, a kiln part includes a supply port configured to receive a raw material supplied to one end side thereof, a discharge port configured to discharge a reaction product to another end side thereof, a cylindrical par extending along and rotatable around a central axis thereof, and a baffle plate provided so as to extend from an inner wall of the cylindrical part and pass through a central area of the cylindrical part including the central axis thereof. A driving part rotates the kiln part around the central axis. A heating part heats an outer peripheral part of the kiln part. The kiln part is configured so that a received predetermined raw material is conveyed to the discharge port along the central axis while being in contact with the baffle plate.

Abstract: An image forming apparatus includes a recording head including a plurality of nozzles that each eject a liquid droplet to a recording medium, the nozzles being arranged in an array, a transport device including an endless belt that transports the recording medium toward an image forming position where the recording head forms an image, a plurality of through holes formed in the endless belt, to be used for a flushing operation, a liquid droplet receptacle that receives a flushing liquid droplet, which has been ejected from the nozzle and passed through the through hole, without being involved in image forming, a skew detection device that detects whether the endless belt is running straightly or skewing so as to shift in a belt width direction, and a levelness adjustment device that adjusts levelness of the transport device.

Abstract: An image forming apparatus includes a recording head, an endless belt, a plurality of through holes for flashing, a droplet receiver, and an anti-floating member. In the recording head, a plurality of nozzles capable of ejecting droplets onto a recording medium are arranged. The endless belt conveys the recording medium toward a position where an image is to be formed on the recording medium by the recording head. The through holes are formed in the endless belt. The droplet receiver receives flashing droplets having been ejected from the nozzles by flashing without contributing to formation of the image and having passed through the through holes. The anti-floating member prevents floating of end portions of the endless belt in a widthwise direction of the endless belt.

Abstract: A method of manufacturing an all-solid-state battery and an apparatus for manufacturing the same are provided. The method of manufacturing the all-solid-state battery includes: (a) a step of forming a non-woven fabric having a fiber made of a resin; (b) a step of applying a slurry containing solid electrolyte particles onto the non-woven fabric; (c) a step of drying the slurry on the non-woven fabric by a heater; (d) a step of pressurizing the slurry on the non-woven fabric by a roller; (e) a step of forming a positive electrode member on one surface of the solid electrolyte membrane; and (f) a step of forming a negative electrode member on the other surface of the solid electrolyte membrane. The step (a) is a step of forming the non-woven fabric by making a resin containing a polar filler fibrous by a laser electrospinning method.

Abstract: In a processing apparatus, a processing furnace includes a supply port configured to receive a processing target and a discharge port configured to discharge a residue. A temperature control region controls a temperature of an intermediate part between the supply port and the discharge port. A screw rotates to be able to convey the processing target supplied from the supply port toward the discharge port. A first decomposition region includes a first recovery port configured to recover a first fluid obtained by decomposing the processing target in a predetermined region in the intermediate part from the processing furnace. A second decomposition region includes a second recovery port configured to recover, from the processing furnace, a second fluid obtained by decomposing the processing target on the downstream side of the first decomposition region.

Abstract: In a reaction apparatus, a reaction furnace is cylindrical and includes a supply port for receiving a raw material to be supplied at one end and a discharge port for discharging a reaction product at another end. A temperature control region includes an apparatus for controlling a temperature of the reaction furnace. A screw extends from the one end of the reaction furnace to the other end and is configured to be able to convey the raw material toward the discharge port by rotating. A first fluid control region includes a first fluid inlet and outlet for allowing a first fluid to pass through the reaction furnace in a predetermined region in the intermediate part. A second fluid control region includes a second fluid inlet and outlet for allowing a second fluid to pass through a region different from the first fluid control region in the intermediate part.

Abstract: An ink jet recording apparatus includes a recording head, a transport device, and a suction device. The transport device includes an endless belt that transports a sheet along a first direction, and a transport plate. The suction device adsorbs the sheet to the endless belt. The endless belt includes a plurality of air intake holes, penetrating in a second direction, intersecting the first direction and corresponding to an ink ejecting direction from the recording head toward the sheet. The transport plate includes a plurality of suction holes penetrating in the second direction, and a plurality of divided transport plates aligned in the first direction. The suction device includes a plurality of suction chambers divided along the first direction. A joint between the divided transport plates adjacent to each other, and a joint between the suction chambers adjacent to each other, are positionally shifted from each other in the first direction.

Abstract: An inkjet recording apparatus includes a line head including at least one recording head, an endless conveyance belt having a plurality of openings and carrying and conveying a recording medium, a driving roller, one or more stretching rollers, and a control portion. The driving roller contacts an inner circumferential surface of the conveyance belt and drives to rotate the conveyance belt. The conveyance belt has opening groups each composed of a plurality of the openings and formed in plural locations at prescribed spacings in the conveyance direction. In a state where any one of the opening groups is in contact with the driving roller, at least one of others of the opening groups is positioned immediately below the line head.

Abstract: An inkjet recording device includes a conveying unit, a recording unit, a device main body, and a control unit. The conveying unit includes an endless conveyor belt having many air holes for sucking air, and a sheet sucking unit. The sheet sucking unit is disposed inside a loop of the conveyor belt, and includes a fan for sucking air through the air holes and a fan drive motor. The recording unit includes a recording head disposed to face an outer circumference surface of the conveyor belt, so as to eject ink from ink ejection nozzles to the paper sheet sucked and held on the conveyor belt. The control unit executes a paper dust removing mode during image non-recording time, in which it rotates the fan drive motor by a power higher than that when conveying the paper sheet, so as to remove paper dust in the device main body.

Abstract: The present disclosure provides a detection method implemented in a plasma processing apparatus. The plasma processing apparatus comprising a plasma processing chamber, a substrate support disposed in the plasma processing chamber and a plurality of heaters disposed in the substrate support, the detection method comprising: disposing a substrate on the substrate support; performing plasma processing by generating plasma in the plasma processing chamber; measuring temperatures of each of the plurality of heaters with a plasma being formed in the plasma processing chamber; and detecting a significant point in the substrate support based on the measured temperatures of the plurality of heaters.

Abstract: A seasoning method implemented in a plasma processing apparatus is provided. The plasma processing apparatus comprises a chamber and an electrostatic chuck, the electrostatic chuck including a central region which supports a substrate and an annular region which surrounds the central region and supports a ring assembly, the seasoning method includes: disposing the ring assembly on the annular region of the electrostatic chuck; disposing the substrate on the central region of the electrostatic chuck; forming a plasma in the chamber; calculating a thermal resistance between the electrostatic chuck and the ring assembly; and determining, based on the calculated thermal resistance, whether to repeat the forming the plasma and the calculating the thermal resistance.

Abstract: A substrate processing method is a substrate processing method for a substrate processing apparatus. The method includes: a) supplying a process gas containing fluorocarbon and a rare gas to a processing container in which a placing pedestal for placing a processing target object including a first region made of silicon oxide is arranged; b) plasma-processing the processing target object by a first plasma of the process gas generated under a first plasma generation condition; c) plasma-processing the processing target object in which a bias potential is generated on the processing target object by a second plasma of the process gas generated under a second plasma generation condition different from the first plasma generation condition; and d) repeating the b) and the c).

Abstract: Properties of a porous film used as a separator of a lithium ion cell are improved. A porous film (separator) of the present invention is a porous film including: a porous base substance S; and a coating film CF arranged on a surface of the porous base substance, the coating film includes: alkali silicate; and a first filler, the first filler is made of inorganic particles, and a content of the alkali silicate is equal to or more than 0.05 weight % with respect to the inorganic particles. The inorganic particle includes a material selected from nano silica, micro silica, carbon nanotube, talc, alumina, boehmite, aluminum hydroxide and glass fiber, and the porous film includes a second filler (a hydrophilic group of a cellulose is substituted with a hydrophobic group), a content of which is equal to or more than 0.05 weight % with respect to the inorganic particles. By usage of the porous film, the cell properties such as the thermal resistance and the cycle property can be improved.

Abstract: An abatement apparatus capable of treating exhaust gas with less wet treatment devices than a conventional abatement apparatus is disclosed. The abatement apparatus includes: a pre-wet treatment device; a combustion treatment device; gas introduction lines coupled to process chambers of a film forming device; first flow-path switching devices coupled to the plurality of gas it lines, respectively; a first gas delivery line extending from the first flow-path switching devices to the pre-wet treatment device; a second gas delivery line extending from the first flow-path switching devices to the combustion treatment device; and an operation controller configured to control operations of the first flow-path switching devices to deliver the process gas to the pre-wet treatment device and deliver the cleaning gas to the combustion treatment device.