Patents by Inventor Satoru SHINTO

Satoru SHINTO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus, method and non-transitory storage medium for accommodating and processing a substrate
    Patent number: 10424499
    Abstract: A substrate accommodating and processing apparatus is provided with a cassette mounting table, a processing part, a substrate transfer mechanism, a partition wall, a cassette stage, and a lid attaching/detaching mechanism. The lid attaching/detaching mechanism is provided with a key configured to be engaged with a key hole installed in the lid, and configured to switch a latch between locking and unlocking positions. The mechanism is also provided with a lid abnormality detecting sensor, a lid attaching/detaching mechanism closing sensor, a lid attaching/detaching mechanism opening sensor, a pressure sensor and a control part.
    Type: Grant
    Filed: March 6, 2017
    Date of Patent: September 24, 2019
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Akihiro Matsumoto, Michiaki Matsushita, Satoru Shinto, Kazunori Kuratomi
  • APPARATUS, METHOD AND NON-TRANSITORY STORAGE MEDIUM FOR ACCOMODATING AND PROCESSING A SUBSTRATE
    Publication number: 20170178941
    Abstract: A substrate accommodating and processing apparatus is provided with a cassette mounting table, a processing part, a substrate transfer mechanism, a partition wall, a cassette stage, and a lid attaching/detaching mechanism. The lid attaching/detaching mechanism is provided with a key configured to be engaged with a key hole installed in the lid, and configured to switch a latch between locking and unlocking positions. The mechanism is also provided with a lid abnormality detecting sensor, a lid attaching/detaching mechanism closing sensor, a lid attaching/detaching mechanism opening sensor, a pressure sensor and a control part.
    Type: Application
    Filed: March 6, 2017
    Publication date: June 22, 2017
    Inventors: Akihiro MATSUMOTO, Michiaki MATSUSHITA, Satoru SHINTO, Kazunori KURATOMI
  • Apparatus, method and non-transitory storage medium for accommodating and processing a substrate
    Patent number: 9627237
    Abstract: A substrate accommodating and processing apparatus is provided with a cassette mounting table, a processing part, a substrate transfer mechanism, a partition wall, a cassette stage, and a lid attaching/detaching mechanism. The lid attaching/detaching mechanism is provided with a key configured to be engaged with a key hole installed in the lid, and configured to switch a latch between locking and unlocking positions. The mechanism is also provided with a lid abnormality detecting sensor, a lid attaching/detaching mechanism closing sensor, a lid attaching/detaching mechanism opening sensor, a pressure sensor and a control part.
    Type: Grant
    Filed: January 7, 2014
    Date of Patent: April 18, 2017
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Akihiro Matsumoto, Michiaki Matsushita, Satoru Shinto, Kazunori Kuratomi
  • APPARATUS, METHOD AND NON-TRANSITORY STORAGE MEDIUM FOR ACCOMMODATING AND PROCESSING A SUBSTRATE
    Publication number: 20140199140
    Abstract: A substrate accommodating and processing apparatus is provided with a cassette mounting table, a processing part, a substrate transfer mechanism, a partition wall, a cassette stage, and a lid attaching/detaching mechanism. The lid attaching/detaching mechanism is provided with a key configured to be engaged with a key hole installed in the lid, and configured to switch a latch between locking and unlocking positions. The mechanism is also provided with a lid abnormality detecting sensor, a lid attaching/detaching mechanism closing sensor, a lid attaching/detaching mechanism opening sensor, a pressure sensor and a control part.
    Type: Application
    Filed: January 7, 2014
    Publication date: July 17, 2014
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Akihiro MATSUMOTO, Michiaki MATSUSHITA, Satoru SHINTO, Kazunori KURATOMI