Abstract: A metrology system measures an amount of displacement of a structure of apparatus including primary mirror, the apparatus including primary mirror including a primary mirror portion including a primary mirror and a primary mirror supporting portion, an elevation axis structural body supporting the primary mirror portion, and being rotatable around an elevation axis, an azimuth mount being rotatable around an azimuth axis allowing an azimuth angle in the orientation direction to be changed, and to support the elevation axis structural body, and a pedestal portion supporting the azimuth mount, and the metrology system includes an elevation axis base portion provided along the elevation axis, passing through a position where the elevation axis and the azimuth axis intersect, and being fixed to the azimuth mount, and an inclinometer that is disposed at a position of the elevation axis base portion through which the azimuth axis passes and measures an inclination angle.

Abstract: A metrology system measures an amount of displacement of a structure of apparatus including primary mirror, the apparatus including primary mirror including a primary mirror portion including a primary mirror and a primary mirror supporting portion, an elevation axis structural body supporting the primary mirror portion, and being rotatable around an elevation axis, an azimuth mount being rotatable around an azimuth axis allowing an azimuth angle in the orientation direction to be changed, and to support the elevation axis structural body, and a pedestal portion supporting the azimuth mount, and the metrology system includes an elevation axis base portion provided along the elevation axis, passing through a position where the elevation axis and the azimuth axis intersect, and being fixed to the azimuth mount, and an inclinometer that is disposed at a position of the elevation axis base portion through which the azimuth axis passes and measures an inclination angle.

Abstract: A parallel link device whose height can be reduced particularly when a movable-side member is brought closer to a fixed-side member, and in which an amount of stroke of the movable-side member can be increased. Specifically, the parallel link device includes a fixed-side member, a movable-side member, six links, and slide mechanisms. Each of the six links has one end connected to the movable-side member with at least two rotational degrees of freedom, and the other end connected to the fixed-side member with at least two rotational degrees of freedom. A connection point of the other end and the fixed-side member is movable with respect to the fixed-side member. Each of the six links has five rotational degrees of freedom and a predetermined length. Each of the slide mechanisms is provided on the fixed-side member and holds the other end of the link movable within a predetermined range.

Abstract: Provided is an insertion guide that performs accurate rotation correction between a shaft and a hole and phase correction between the shaft and hole. The shaft includes: a first guide portion at a distal end of the shaft having a diameter smaller than a diameter of the hole; a second guide portion, provided on a base end side of a first narrow cylindrical portion, and having a diameter smaller than the diameter of the hole and larger than a diameter of the first narrow cylindrical portion; and a third guide portion, provided at the distal end of the shaft, and is a recessed portion to be engaged with a protruding portion formed in the hole. The shaft being inclined with respect to the hole, is brought into contact with the hole at two points or less before the third guide portion is brought into contact with the protruding portion.

Abstract: A mirror replacement device includes a gripping mechanism to grip a segment mirror, a fine drive mechanism to change a position and a posture of the gripping mechanism, a lift mechanism for the segment mirror, a first detector to detect a relative position and a relative posture between a comparison object and a target object, a second detector to detect a bend of the fine drive mechanism, and a mirror replacement controller to replace the segment mirror based on detection signals output from the above-mentioned detectors. The controller determines whether the first detector can successfully perform a measurement. When it is determined that the measurement can be successfully performed, the control is performed based on the detection signal output from the first detector. When it is determined that the measurement cannot be successfully performed, the control is performed based on the detection signal output from the second detector.

Abstract: A storage device stores capturing conditions including a viewpoint position and a shooting direction of the camera, model data including a shape of a segmented mirror, and feature point data representing a positional relationship among a viewpoint position and feature points. A camera captures the segmented mirror having a reflective surface to obtain a captured image including at least a part of the reflective surface. A marker object has feature points, and is fixed at a predetermined position with respect to the camera. A feature-point extracting unit extracts multiple feature points from a captured image in which the feature points are reflected in the reflective surface, and determines positions of the feature points within the captured image. A position measuring unit calculates a position of the segmented mirror, based on the capturing conditions, the model data, the feature point data, and the positions of the feature points within the captured image.

Abstract: Provided is an insertion guide that performs accurate rotation correction between a shaft and a hole and phase correction between the shaft and hole. The shaft includes: a first guide portion at a distal end of the shaft having a diameter smaller than a diameter of the hole; a second guide portion, provided on a base end side of a first narrow cylindrical portion, and having a diameter smaller than the diameter of the hole and larger than a diameter of the first narrow cylindrical portion; and a third guide portion, provided at the distal end of the shaft, and is a recessed portion to be engaged with a protruding portion formed in the hole. The shaft being inclined with respect to the hole, is brought into contact with the hole at two points or less before the third guide portion is brought into contact with the protruding portion.

Abstract: A parallel link device whose height can be reduced particularly when a movable-side member is brought closer to a fixed-side member, and in which an amount of stroke of the movable-side member can be increased. Specifically, the parallel link device includes a fixed-side member, a movable-side member, six links, and slide mechanisms. Each of the six links has one end connected to the movable-side member with at least two rotational degrees of freedom, and the other end connected to the fixed-side member with at least two rotational degrees of freedom. A connection point of the other end and the fixed-side member is movable with respect to the fixed-side member. Each of the six links has five rotational degrees of freedom and a predetermined length. Each of the slide mechanisms is provided on the fixed-side member and holds the other end of the link movable within a predetermined range.

Abstract: A mirror replacement device includes a gripping mechanism to grip a segment mirror, a fine drive mechanism to change a position and a posture of the gripping mechanism, a lift mechanism for the segment mirror, a first detector to detect a relative position and a relative posture between a comparison object and a target object, a second detector to detect a bend of the fine drive mechanism, and a mirror replacement controller to replace the segment mirror based on detection signals output from the above-mentioned detectors. The controller determines whether the first detector can successfully perform a measurement. When it is determined that the measurement can be successfully performed, the control is performed based on the detection signal output from the first detector. When it is determined that the measurement cannot be successfully performed, the control is performed based on the detection signal output from the second detector.

Abstract: A storage device stores capturing conditions containing a viewpoint position and a shooting direction of the camera, model data containing a shape of a segmented mirror, and feature point data representing a positional relationship among a viewpoint position and feature points. A camera captures the segmented mirror having a reflective surface to obtain a captured image containing at least a part of the reflective surface. A marker object has feature points, and is fixed at a predetermined position with respect to the camera. A feature-point extracting unit extracts multiple feature points from a captured image when the feature points are reflected in the reflective surface, and determines positions of the feature points within the captured image. A position measuring unit calculates a position of the segmented mirror, based on the capturing conditions, the model data, the feature point data, and the positions of the feature points within the captured image.