Patents by Inventor Satoru Yasaka

Satoru Yasaka has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Displacement calculation method, drawing data correction method, substrate manufacturing method, and drawing apparatus
    Patent number: 8886350
    Abstract: Correction values (?X1 to ?X4) at the X position (X=xe) of a target point (E (xe, ye)) are calculated by calculating the amounts of shift (?X) in the positions of alignment marks (M11 to M14, M21 to M24, M31 to M34, M41 to M44) in the X direction and plotting first spline curves (SL1) using the amounts of shift. Then, a first sub-spline curve (SL1S) is plotted using the correction values (?X1 to ?X4) in order to calculate a correction value (?Xe) at the Y position (Y=ye) of the target point (E (xe, ye)), and the calculated correction value is taken as the correction amount in the X direction. The correction amount in the Y direction is also calculated in the same manner.
    Type: Grant
    Filed: September 29, 2011
    Date of Patent: November 11, 2014
    Assignee: SCREEN Holdings Co., Ltd.
    Inventors: Ryo Yamada, Satoru Yasaka
  • DISPLACEMENT CALCULATION METHOD, DRAWING DATA CORRECTION METHOD, SUBSTRATE MANUFACTURING METHOD, AND DRAWING APPARATUS
    Publication number: 20120083916
    Abstract: Correction values (?X1 to ?X4) at the X position (X=xe) of a target point (E (xe, ye)) are calculated by calculating the amounts of shift (?X) in the positions of alignment marks (M11 to M14, M21 to M24, M31 to M34, M41 to M44) in the X direction and plotting first spline curves (SL1) using the amounts of shift. Then, a first sub-spline curve (SL1S) is plotted using the correction values (?X1 to ?X4) in order to calculate a correction value (?Xe) at the Y position (Y=ye) of the target point (E (xe, ye)), and the calculated correction value is taken as the correction amount in the X direction. The correction amount in the Y direction is also calculated in the same manner.
    Type: Application
    Filed: September 29, 2011
    Publication date: April 5, 2012
    Inventors: Ryo Yamada, Satoru Yasaka