Patents by Inventor Satoshi Bannai

Satoshi Bannai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for plasma control
    Patent number: 6255220
    Abstract: The present invention provides a method for plasma control, in which an electric field is generated in the direction perpendicular to the surface of an object to be processed in plasma atmosphere generated in a processing chamber and another electric field is generated in the direction parallel to the surface, and the direction of ion or electron in plasma atmosphere is controlled by controlling the composite electric field composed of both the electric fields. The invention provides also an apparatus for plasma control provided with a perpendicular electric field generating means for generating an electric field in the direction perpendicular to the surface of the object, and a parallel electric field generating means for generating an electric field in the direction parallel to the surface of the object.
    Type: Grant
    Filed: July 6, 1999
    Date of Patent: July 3, 2001
    Assignee: Sony Corporation
    Inventors: Toshiro Kisakibaru, Akira Kojima, Yasushi Kato, Isao Honbori, Satoshi Bannai, Tomohiro Chiba, Toshitaka Kawashima
  • Method and apparatus for plasma control
    Patent number: 5945008
    Abstract: The present invention provides a method for plasma control, in which an electric field is generated in the direction perpendicular to the surface of an object to be processed in plasma atmosphere generated in a processing chamber and another electric field is generated in the direction parallel to the surface, and the direction of ion or electron in plasma atmosphere is controlled by controlling the composite electric field composed of both the electric fields. The invention provides also an apparatus for plasma control provided with a perpendicular electric field generating means for generating an electric field in the direction perpendicular to the surface of the object, and a parallel electric field generating means for generating an electric field in the direction parallel to the surface of the object.
    Type: Grant
    Filed: September 26, 1995
    Date of Patent: August 31, 1999
    Assignee: Sony Corporation
    Inventors: Toshiro Kisakibaru, Akira Kojima, Yasushi Kato, Isao Honbori, Satoshi Bannai, Tomohiro Chiba, Toshitaka Kawashima