Patents by Inventor Satoshi Hasui

Satoshi Hasui has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 4785188
    Abstract: A primary particle beam irradiation apparatus comprising a stage on which a target is placed; a device for irradiating a predetermined scan region on the stage with a primary particle beam; a secondary ion sensor for detecting a secondary ion, generated by an irradiation of the primary particle beam, from the stage or the target; and a device, connected to the irradiating device and the secondary ion sensor, for controlling the irradiating means on the basis of an output signal from the secondary ion sensor.
    Type: Grant
    Filed: September 29, 1987
    Date of Patent: November 15, 1988
    Assignees: Fujitsu Limited, Tokyo Electron Limited
    Inventors: Haruhisa Mori, Tadayuki Kojima, Satoshi Hasui, Hiroshi Ohmori, Shuji Kikuchi