Abstract: To provide a process, whereby a low molecular weight organic compound having at most 20 carbon atoms present in a trace amount in a cloth made of chemical fibers treated with a water and oil repellent agent, can be accurately analyzed.

Abstract: Provided is a process whereby a low molecular weight organic compound having at most 20 carbon atoms present in a trace amount in a water/oil repellent composition can be analyzed accurately. A process for analysis which comprises (a) a step of mixing a water/oil repellent composition in which a fluorinated polymer having repeating units based on a compound having a perfluoroalkyl group is dispersed or dissolved in a medium, and a C1-5 alcohol, and agglomerating the fluorinated polymer to obtain a liquid containing agglomerates of the fluorinated polymer, (b) a step of subjecting the liquid containing the agglomerates of the fluorinated polymer to solid-liquid separation to obtain a liquid phase, and (c) a step of measuring the concentration of a low molecular weight organic compound having at most 20 carbon atoms in the liquid phase by means of LC-MS, LC-MS/MS or GC-MS.