Patents by Inventor Satoshi Joya

Satoshi Joya has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate Cleaning Device and Cleaning Method Thereof
    Publication number: 20080047577
    Abstract: A substrate cleaning device includes a rotating table that rotatably holds a silicon substrate. A light irradiation device is capable of irradiating at least a portion of a surface of the held silicon substrate with light. A nozzle is capable of selectively supplying at least N2O water and a hydrofluoric acid solution onto the substrate. A control unit controls the supply of the light irradiation device and the nozzle and enables light irradiation by the light irradiation device when the N2O water is supplied onto the silicon substrate.
    Type: Application
    Filed: September 4, 2007
    Publication date: February 28, 2008
    Inventors: Hideto Goto, Kenji Furusawa, Satoshi Joya, Ryuji Sotoaka, Keiichi Tanaka, Yoshiya Kimura, Tomoyuki Azuma
  • Method for cleaning a substrate using a sherbet-like composition
    Patent number: 6676766
    Abstract: A method for cleaning a substrate with sherbet-like composition, comprising mixing the liquid organic agent and pure water in a mixing vessel to form a mixture, supercooling the mixture uniformly at a predetermined temperature while stirring the mixture, wherein the stirring includes creating vortices in the mixture, growing the vortices and diffusing the grown vortices in the mixture, thus providing sherbet-like cleaning composition and moving the sherbet-like cleaning composition relative to the substrate to be cleaned.
    Type: Grant
    Filed: May 2, 2001
    Date of Patent: January 13, 2004
    Assignee: Sprout Co., Ltd.
    Inventors: Riichiro Harano, Masami Furusawa, Satoshi Joya
  • Sherbet-like cleaning composition and method and system for cleaning substrate
    Publication number: 20010037818
    Abstract: A system for cleaning a substrate according to the present invention comprises an apparatus for producing a sherbet-like composition consisting of snow ice grains and a chemical agent, holder means for holding a substrate to be cleaned, supply means for supplying to the substrate the sherbet-like composition for cleaning the substrate, and means for moving the sherbet-like composition being supplied relative to at least one of the surfaces of the substrate.
    Type: Application
    Filed: May 2, 2001
    Publication date: November 8, 2001
    Inventors: Riichiro Harano, Masami Furusawa, Satoshi Joya