Abstract: A coating film separating device includes a substrate holding device for holding a substrate, at least one side of which is covered with a coating film, a roller unit equipped with a roller and a device for pressing the roller against an end portion of the surface of the coating film, a roller unit driving device for moving the roller unit on the end portion of the surface of the coating film in the widthwise direction of the substrate, a guide device for enabling the roller unit to move along an end portion of the substrate, and a device for spraying pressurized fluid at the interface between the substrate and the coating film at the edge portion of the substrate along which the roller unit moves.

Abstract: A method of manufacturing a porous static pressure gas bearing includes the steps of impregnating a porous material to be adjusted in injection flow rate with resin and closing vent openings, and applying a solvent for dissolving the resin to the porous material through a pattern having a predetermined opening distribution.