Abstract: The present invention provides a splinter shield for a vacuum pump, capable of reducing costs of the splinter shield by obtaining a single sheet of splinter shield having a required strength, in which fastening strength to a fixing groove is enhanced to prevent the splinter shield from bending toward the inside of a pump and coming into contact with equipment inside the pump when air rushes into the pump through an inlet port and to prevent the splinter shield from falling. Furthermore, attachment and removal of the splinter shield with respect to the inlet port are facilitated.

Abstract: To provide a stator member that facilitates thermal radiation from a surface thereof and thermal conduction to an adjacent member, and a vacuum pump that contains the stator member. For the purpose of enhancing heat dissipation of a rotor portion, surface treatment removal processing is performed on a predetermined section of a thread groove spacer in order to efficiently release heat of the thread groove spacer toward a base and a stator blade spacer. More specifically, the surface treatment removal processing removes the surface treatment of the base and a section where the stator blade spacer comes into contact with the thread groove spacer. This surface treatment removal processing is executed simultaneously with finishing processing.

Abstract: A vacuum pump including a pump main unit and a control unit is disclosed. The control unit includes a substrate having electronic elements mounted thereon and terminal pins soldered to the substrate at a first end edge of the substrate. The substrate is mounted to a plate via an attachment near a second end edge opposing the first end edge and the plate is mounted to the pump main unit. The terminal pins extend through the plate. Upon linear thermal expansion of the terminal pins, by reason of the location of the terminal pins near the first end edge and the attachment near the second end edge, stresses in the soldered pin connections are reduced. A molding material having a Shore hardness of less than 50, is molded around the electronic elements on the substrate in one embodiment.

Abstract: To provide a stator member that facilitates thermal radiation from a surface thereof and thermal conduction to an adjacent member, and a vacuum pump that contains the stator member. For the purpose of enhancing heat dissipation of a rotor portion, surface treatment removal processing is performed on a predetermined section of a thread groove spacer in order to efficiently release heat of the thread groove spacer toward a base and a stator blade spacer. More specifically, the surface treatment removal processing removes the surface treatment of the base and a section where the stator blade spacer comes into contact with the thread groove spacer. This surface treatment removal processing is executed simultaneously with finishing processing.

Abstract: The present invention provides a splinter shield for a vacuum pump, capable of reducing costs of the splinter shield by obtaining a single sheet of splinter shield having a required strength, in which fastening strength to a fixing groove is enhanced to prevent the splinter shield from bending toward the inside of a pump and coming into contact with equipment inside the pump when air rushes into the pump through an inlet port and to prevent the splinter shield from falling. Furthermore, attachment and removal of the splinter shield with respect to the inlet port are facilitated.

Abstract: To be provided is a vacuum pump reducing the influence of thermal expansion of connector pins to prevent cracks in soldered parts while preventing damage to electronic elements. Pins 207 linearly expand with the heat accumulated in a bottom space 301. The bottom space 301 is heated quite easily since it is in a vacuum environment. A screw 235A is arranged near the left edge of an AMB control substrate 209. Since no screw is arranged on the right of the screw 235A, the AMB control substrate 209 is released toward the right. When the pins 207 expand with heat, the AMB control substrate 209 bends by an angle ?2 from the screw 235A as a fulcrum, but this bend angle is gradual, which means that the possibility of causing cracks in solder connection parts between the AMB control substrate 209 and the pins 207 is extremely small. Since deforming pressure of the AMB control substrate 209 is reduced, influence on the electronic elements can be reduced correspondingly.

Abstract: A damper is configured for a vacuum pump that evacuates a vacuum system via gas transfer by a gas transfer mechanism in the vacuum pump by the rotating action of a rotating body in the vacuum pump. The damper restrains the propagation of vibrations produced in the vacuum pump to the vacuum system during an evacuation operation. The damper comprises a vibration absorbing device that is positionable between the vacuum pump and the vacuum system during an evacuation operation and that has a damping characteristic in a frequency band that coincides substantially with a rotation frequency of the rotating body of the vacuum pump.

Abstract: A vacuum pump evacuates gas from a chamber by coaction of a rotationally driven rotor and a stator. An electrical equipment section that rotates the rotor is housed within a stator column integral with the stator. A cooling water pipe is buried in a wall of the stator column near the electrical equipment section. One end of the cooling water pipe branches into a plurality of water inlet ports and the other end branches into a plurality of water outlet ports. One pair of water inlet and outlet ports opens to the outside of the vacuum pump at a side surface of the stator column and another pair of water inlet and outlet ports opens to the outside at the underside of the stator column.

Abstract: A vacuum pump casing has an opening that is covered and sealed by a cover member. The cover member is formed of molded resin with connector pins molded therein. The connector pins project outwardly from opposite sides of the cover member and are connected outside the pump casing to cables leading to a control device and connected inside the pump casing to cables leading to components within the pump casing.

Abstract: Provided are a terminal structure capable of preventing damage due to an excessive force and having high sealing property, and a vacuum pump to which the terminal structure is applied. When a control device (400) undergoes transition to a turbo molecular pump main body (300), a cylindrical wall (603) of a female connector (600) is fit-engaged with a cavity (504) of a male connector (500). As the connection progresses, head portions (511a) at one ends of male pins (511) are inserted into pin insertion elongated holes (624). When, after that, a forward end of the cylindrical wall (603) of the control device (400) abuts a bottom portion (501) of the female connector (600), the female connector (600) on the control device (400) side, which is of low rigidity, is pushed back against an elastic force of waved washers (613).

Abstract: A terminal structure has a first connector arranged at a first member, such as a vacuum pump, and a plurality of connector pins. A second member, such as a control device, is movable toward and away from the first member, and a second member side bolt is arranged at the second member. A second connector has a plurality of connecting pins and a flange portion through which the bolt passes and which is movable with respect to the bolt while the second connector is being fit-engaged with the first connector to electrically connect the connector pins of the first and second connectors. An elastic member elastically retains the flange portion and produces an elastic force that resists a push-back displacement which acts on the second connector at the moment of fit-engagement with the first connector in either a direction parallel to the bolt or in a direction inclined at an angle from the parallel direction.

Abstract: To provide a damper capable of reducing vibrations in a particular frequency band while holding the degree of freedom of installation posture of a vacuum pump. A bellows 44 and an elastic member 45 are arranged with a clearance sufficient enough to prevent contact being provided. The elastic member 45 is provided with a spring element K and a damping element C, and the bellows 44 is provided with a spring element k and a mass element m. Thus, a notch filter type vibration isolator is formed. The bellows 44 and the elastic member 45 are set at constants of the elements such that the center frequency (fc) of a notch band is close to the rotation frequency of a rotor 8. The material and expansion amount of member are adjusted so as to agree with the constants of the elements.

Abstract: Provided are a terminal structure capable of preventing damage due to an excessive force and having high sealing property, and a vacuum pump to which the terminal structure is applied. When a control device (400) undergoes transition to a turbo molecular pump main body (300), a cylindrical wall (603) of a female connector (600) is fit-engaged with a cavity (504) of a male connector (500). As the connection progresses, head portions (511a) at one ends of male pins (511) are inserted into pin insertion elongated holes (624). When, after that, a forward end of the cylindrical wall (603) of the control device (400) abuts a bottom portion (501) of the female connector (600), the female connector (600) on the control device (400) side, which is of low rigidity, is pushed back against an elastic force of waved washers (613).

Abstract: The present invention is to provide a vacuum pump in which an electrical equipment section for rotating a rotor is efficiently cooled so as to maintain in proper temperature, and further several types pumps capable of using common vacuum pump components even for a vacuum pump having a different size and shape though having same structure, and to make the vacuum pump components common. A vacuum pump according to the present invention, which generates vacuum by sucking and discharging a gas with rotation of a rotor, wherein a cooling water pipe is buried in the wall of a stator column which includes an electrical equipment section for rotating the rotor and is formed integrally with a base, said cooling water pipe having a branched water inlet port and a branched outlet port and being provided just near the electrical equipment section arranged near the center of the vacuum pump.

Abstract: A molecular pump has a casing having a gas inlet port and a gas discharge port, a stator disposed within the casing, a shaft disposed in the casing concentrically with the stator, a bearing rotatably supporting the shaft for undergoing rotation relative to the stator in a preselected direction of rotation, a rotor mounted on the shaft for rotation therewith in the preselected direction of rotation, and a motor for rotationally driving the shaft. A flange is connected to the casing at the gas inlet port.

Abstract: A vacuum pump has a pump case having a gas suction port at an upper surface thereof, a rotor shaft mounted in the pump case for undergoing rotation, and a rotor connected to the rotor shaft for rotation therewith. The rotor has inner and outer circumferential surfaces coated with a corrosion-resistant film treated by nonelectrolytic plating. Rotor blades are disposed in the pump case and are integrally connected to the outer circumferential surface of the rotor. Stator blades are integrally connected to the pump case so that the rotor blades and the stator blades are alternately positioned and arranged. A balancing body is disposed on the inner circumferential surface of the rotor for balancing the rotor during rotation thereof.

Abstract: A vacuum pump has a rotor mounted to undergo rotation about a rotational axis. A cylindrical base member surrounds a lower outer periphery of the rotor. A cylindrical pump case surrounds an upper outer periphery of the rotor. The base member has an inner periphery, an outer periphery, and a groove formed between the inner and outer peripheries thereof. The pump case is connected to the base member so that a portion of the outer periphery of the base member confronts a portion of the inner periphery of the pump case. A thread groove is formed in the inner periphery of the base member.

Abstract: A turbo-molecular pump has a main body and a pump case for covering the main body. A first flange is integrally formed with the pump case for connection to a second flange integrally with a vacuum chamber. The flange of the pump case and the flange of the vacuum chamber are integrally connected together with fastening bolts. A clamping structure separately clamps the first and second flanges together by surrounding a portion of each of the first and second flanges.

Abstract: A vacuum pump adopts a positioning structure in which stator blades and spacers are arranged in the radial direction of a pump case by the contact between the outer peripheries portion of the stator blades and the inner periphery portion of the pump case and the contact between the outer periphery portions of the spacers and the inner periphery portion of the pump case. Accordingly, the spacer interposed between the upper and lower stator blades can have a simplified shape that serves a function of only setting the spacing between the stator blades to a prescribed length, thus decreasing the number of steps and costs of processing the spacer, and accordingly reducing the costs of the entire vacuum pump.

Abstract: A vacuum pump is removably connected to the underside of a chamber for exhausting gas molecules from the chamber. The vacuum pump has a pump case having a flange extending circumferentially around a top portion thereof, a suction port and an exhaust port. Stator blades are fixedly mounted within the pump case, and a rotor is rotatably mounted in the pump case and has rotor blades alternately disposed with respect to the stator blades. A driving motor rotationally drives the rotor so that the rotating rotor blades coact with the stator blades to evacuate gas molecules from the chamber and pump the gas molecules from the suction port to the exhaust port. Bolt insertion holes are formed in the flange and each hole has a smaller diameter portion opening at a lower surface of the flange and a larger diameter portion opening at an upper surface of the flange which faces the underside of the chamber.