Abstract: A control apparatus includes a version information collection section for collecting version information based on a user's specification from a plurality of programs including a program for controlling substrate processing equipment for processing a substrate, a version information file for storing the version information collected by the version information collection section, and a display for displaying the version information.

Abstract: A process control system includes a plurality of machine controllers for individually controlling a plurality of process chambers and a main controller for controlling the machine controllers. Each of the machine controllers has a function of transferring process data detected by its corresponding process chamber to the main controller. The main controller has a storage device for accumulating process data transferred from the machine controllers and a function of transferring the accumulated process data to a host computer when the main controller is in a predetermined control load state.

Abstract: By dividing a range within which a control device can be operated into a plurality of hierarchical operating levels corresponding to levels of different users of that control device, and inputting information such as the name and password of each of these users, the present invention makes it possible to set an operating level corresponding to each of these users. Once an operating level is set, an operating portion is configured to disable the operation of the control device in an operating range that exceeds this operating level. The configuration is such that switch portions of the operating panel are allocated to a certain operating level, but switch portions relating to operating levels other than the currently set operating level are disabled.