Abstract: A processing machine includes mirrors and to reflect a beam L oscillated from a laser oscillator to a predetermined surface on which a workpiece is arranged, optical axis operating mechanisms and to position an optical axis of the beam L at a desired target irradiation position by changing directions of the mirrors and, a camera sensor to capture an image of the target irradiation position and its periphery reflected in the mirror, and an error calibration mechanism to detect an error between the target irradiation position instructed to the optical axis operating mechanisms and an actual position of the optical axis of the beam L in the predetermined surface by referring to the image captured by the camera sensor. A correction amount to the optical axis operating mechanisms and is determined based on the error to irradiate the target irradiation position with the beam L during processing.

Abstract: A processing machine is configured to include a processing device capable of applying processing for forming many holes to a processing area as a part of a region to be processed in a workpiece, a transferring device to relatively move the workpiece with respect to the processing device after the processing is applied to a certain area in the region to be processed, and to position an unprocessed area as a new area to be processed by the processing device, a processing pattern storage unit to store information defining arrangement positions of the holes formed by the processing device, and a control unit to determine a target processing position of each of the holes by adding a position correction amount of each hole on a random basis to the position of each hole defined by the information stored in the processing pattern storage unit.

Abstract: A processing machine includes mirrors and to reflect a beam L oscillated from a laser oscillator to a predetermined surface on which a workpiece is arranged, optical axis operating mechanisms and to position an optical axis of the beam L at a desired target irradiation position by changing directions of the mirrors and, a camera sensor to capture an image of the target irradiation position and its periphery reflected in the mirror, and an error calibration mechanism to detect an error between the target irradiation position instructed to the optical axis operating mechanisms and an actual position of the optical axis of the beam L in the predetermined surface by referring to the image captured by the camera sensor. A correction amount to the optical axis operating mechanisms and is determined based on the error to irradiate the target irradiation position with the beam L during processing.