Abstract: A manufacturing method of a photomask according to the embodiment sets an exposure condition applied when a resist is formed into a three-dimensional target shape by using a photomask including a plurality of light-shielding areas. Subsequently, the method sets a hypothetical target shape obtained by correcting a target shape based on a development characteristic of the resist for the exposure condition. Subsequently, the method creates a pattern of the photomask corresponding to the hypothetical target shape. Subsequently, the method simulates a prediction shape of the resist when the pattern is used. Subsequently, the method calculates a cost function related to an error between the prediction shape and the hypothetical target shape. Subsequently, the method adjusts the pattern based on a result of the calculation of the cost function.

Abstract: According to one embodiment, a layout region of a mask pattern is divided into N (N is an integer of 2 or larger) units, a main pattern resolved by exposure light is arranged and sub patterns not resolved by the exposure light are arranged outside the main pattern such that distributions of attenuation amount of the exposure light in the divided layout regions are different.

Abstract: A mechanism for reducing pressure pulsation includes a pair of metal dampers formed by joining two disk-shaped metal diaphragms over an entire circumference and forming a hermetically sealed space inside a joined portion. Gas is sealed in the aforementioned hermetically sealed space of the damper, and a pair of pressing members give pressing forces to both outer surfaces of the aforementioned metal dampers at a position at an inner diameter side from the joined portion. The mechanism is unitized, with the pair of pressing members being connected in a state in which they sandwich the metal damper.

Abstract: A high-pressure fuel supply pump including an electromagnetically driven intake valve is configured such that a pressure equalizing hole is provided in the valve stopper positioned between the valve and a pressurizing chamber. The pressure equalization hole connects a spring storage space, provided between a valve and a valve stopper, with a surrounding fluid passage. The high-pressure fuel supply pump is further configured such that an opening of the pressure equalizing hole at the spring storage chamber side is open at a position at the inner side of a diameter of the spring. Since the pressure in the pressurizing chamber can be introduced into the inner side of the spring without traversing the spring, the unstable behavior of the spring or the valve due to the introduced pressure eliminated. Since the force applied to the valve when the valve closes is stabilized, the closing timing of the valve is stable.

Abstract: Provided is a high-pressure fuel pump in which responsiveness of closing a suction valve can be maintained even when the high-pressure fuel pump is increased in pressure or capacity of the high-pressure fuel pump is increased, thereby ensuring discharge efficiency. Therefore, the high-pressure fuel pump includes the rod that urges the suction valve in the valve opening direction, the mover that drives the rod in the valve closing direction, and the solenoid that generates a magnetic attraction force for moving the mover in the valve closing direction. After the suction valve starts moving from the suction valve closing position in the valve opening direction, the rod reaches the suction valve closing position and further moves in the valve opening direction.

Abstract: A high-pressure fuel pump capable of reducing the number of components and decreasing the manufacturing cost by processing of a pump body is provided. The high-pressure fuel pump includes a metal damper, a pump body in which a damper housing that houses the metal damper is formed, a damper cover attached to the pump body, covering the damper housing, and holding the metal damper between the pump body and the damper cover, and a holding member fixed to the damper cover and holding the metal damper from a side opposite to the damper cover. The holding member is provided with an elastic portion that urges the pump body so that the metal damper is urged toward the damper cover.

Abstract: To reduce collision noise created by the operation of an electromagnetic suction valve provided on a high pressure fuel supply pump. In the present invention, in order to achieve the above object, the mass of a member which collides by magnetic attractive force is reduced to reduce the noise to be generated. The thus configured present invention provides the following advantageous effects. The noise generated when a core and an anchor collide with each other by magnetic attractive force depends on the magnitude of the kinetic energy of a moving element. The kinetic energy to be consumed in the collision is only the kinetic energy of the anchor. The kinetic energy of a rod, being absorbed by a spring, does not contribute to the noise; thus, the energy when the anchor and the core collide with each other can be reduced, whereby the noise to be created can be reduced.

Abstract: A manufacturing method of a photomask according to the embodiment sets an exposure condition applied when a resist is formed into a three-dimensional target shape by using a photomask including a plurality of light-shielding areas. Subsequently, the method sets a hypothetical target shape obtained by correcting a target shape based on a development characteristic of the resist for the exposure condition. Subsequently, the method creates a pattern of the photomask corresponding to the hypothetical target shape. Subsequently, the method simulates a prediction shape of the resist when the pattern is used. Subsequently, the method calculates a cost function related to an error between the prediction shape and the hypothetical target shape. Subsequently, the method adjusts the pattern based on a result of the calculation of the cost function.

Abstract: Provide is a high-pressure fuel pump capable of improving the degree of freedom of layout of members to be attached to a pump body and a producing method thereof. Therefore, the high-pressure fuel pump includes the suction joint that sucks fuel, the pump body formed with the pressurizing chamber that pressurizes the fuel sucked from the suction joint, and the discharge joint that discharges the fuel pressurized in the pressurizing chamber. The pump body is formed so that at least a part of the side surface portion thereof becomes a cylindrical portion or a polygonal shape portion. At least one of the discharge joint and the suction joint may be fixed on the inner peripheral side with respect to the outermost peripheral portion of the cylindrical portion or the polygonal shape portion of the side surface portion.

Abstract: Responsiveness of an electromagnetic flow-rate control valve provided for closing a suction valve is improved and a discharge flow rate is controlled to a desired value. A flow-rate control valve includes a fixed core arranged on an inner circumferential side of a coil, a yoke arranged on an outer circumferential side of the coil, and a cover portion opposed to the coil in an axial direction, in which the fixed core has an enlarged portion in contact with the cover portion in the axial direction and enlarging toward the coil, and the cover portion is regulated in the axial direction only by a contact portion with the fixed core.

Abstract: According to one embodiment, there is provided a mask data generation method. The mask data generation method includes obtaining depth information about a pattern depth of a hole included in design information about a semiconductor device. The mask data generation method includes obtaining a first correction rule used to correct, in terms of the pattern depth, a process conversion difference between a resist pattern and a processed pattern. The mask data generation method includes determining temporary mask data including a lithography target pattern by applying a first process conversion difference correction processing to a dimension of hole pattern arranged in design layout data based on the depth information and the first correction rule.

Abstract: To reduce collision noise created by the operation of an electromagnetic suction valve provided on a high pressure fuel supply pump. In the present invention, in order to achieve the above object, the mass of a member which collides by magnetic attractive force is reduced to reduce the noise to be generated. The thus configured present invention provides the following advantageous effects. The noise generated when a core and an anchor collide with each other by magnetic attractive force depends on the magnitude of the kinetic energy of a moving element. The kinetic energy to be consumed in the collision is only the kinetic energy of the anchor. The kinetic energy of a rod, being absorbed by a spring, does not contribute to the noise; thus, the energy when the anchor and the core collide with each other can be reduced, whereby the noise to be created can be reduced.

Abstract: A fuel pump includes an intake valve unit which is provided between a low-pressure chamber and a pressurizing chamber. The intake valve unit includes an intake valve configured to move in an axial direction of the intake valve unit and a valve stopper arranged between the intake valve and the pressurizing chamber. A plurality of fuel passages configured to allow fuel to communicate between the low-pressure chamber and the pressurizing chamber are formed on a radially outward of an outer peripheral surface of the valve stopper.

Abstract: According to one embodiment, in a mask data generation system, a first acquisition part is configured to acquire pattern contour data included in each of a plurality of layout candidate data for a first layer. A second acquisition part is configured to acquire pattern contour data included in layout data for a second layer. A superimposing part is configured to superimpose the contour data acquired by the first acquisition part and the contour data acquired by the second acquisition part with each other, for each of the plurality of layout candidate data. An area calculation part is configured to calculate an overlap area between a first pattern in the contour data acquired by the first acquisition part and a second pattern in the contour data acquired by the second acquisition part, based on the superimposed data, for each of the plurality of layout candidate data.

Abstract: According to one embodiment, a layout region of a mask pattern is divided into N (N is an integer of 2 or larger) units, a main pattern resolved by exposure light is arranged and sub patterns not resolved by the exposure light are arranged outside the main pattern such that distributions of attenuation amount of the exposure light in the divided layout regions are different.

Abstract: An object of the present invention is to obtain a high pressure fuel supply pump capable of reducing pressure pulsation that occurs in a low pressure pipe, preventing damage to the low pressure pipe, or reducing noise due to vibrations of the low pressure pipe.

Abstract: Responsiveness is improved in valve opening and valve closing of an electromagnetically driven intake valve unit in which a valve is provided on a pressurizing chamber side of a valve seat. The valve includes an annular abutting surface that abuts the valve seat to shut off a fuel intake passage and a bottomed cylindrical part provided at an inner peripheral part of the annular abutting surface. The bottomed cylindrical part is inserted into a fuel introduction hole formed in the valve housing inside the valve seat, and the outer surface of an end part of the bottomed cylindrical part is exposed to fuel in a low pressure fuel chamber provided upstream of the fuel introduction hole.

Abstract: A high-pressure fuel supply pump includes a plunger, a valve member, a valve seat, a pressurizing chamber, and a fuel passage. The fuel passage includes a gap passage portion formed in a gap between the valve seat and the valve member. The fuel passage also includes a bent passage portion extending in a bent direction with respect to the gap passage portion, on the downstream side of the gap passage portion. The inner surface of the valve member, on a side thereof that faces the valve seat, has a convex shape in an area of the valve member that is between the bent passage portion and the gap passage portion.

Abstract: A mechanism for reducing pressure pulsation includes a pair of metal dampers formed by joining two disk-shaped metal diaphragms over an entire circumference and forming a hermetically sealed space inside a joined portion. Gas is sealed in the aforementioned hermetically sealed space of the damper, and a pair of pressing members give pressing forces to both outer surfaces of the aforementioned metal dampers at a position at an inner diameter side from the joined portion. The mechanism is unitized, with the pair of pressing members being connected in a state in which they sandwich the metal damper.

Abstract: A high pressure fuel supply pump includes: an electromagnetic suction valve that adjusts an amount of fuel sucked into a pressuring chamber; a discharge valve that discharges the fuel from the pressuring chamber; and a plunger that makes a reciprocating motion in the pressuring chamber. The electromagnetic suction valve includes an electromagnetic coil, a suction valve, and a movable portion that is able to close the suction valve by a magnetic force when the electromagnetic coil is energized. The movable portion includes an anchor that is driven to close the suction valve by the magnetic force and stops at a fixed member, and a rod that is driven with the anchor and is able to move even after the anchor stops. The electromagnetic suction valve includes a first and second springs that bias the suction valve in closed and open direction, respectively, and a third spring in the rod.