Patents by Inventor Satosi Isido

Satosi Isido has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of packing a semiconductor manufacturing apparatus to be carried into a clean room
    Patent number: 6351925
    Abstract: A packing method of an object to be carried in a clean room that can reduce remarkably the amount of evolution of waste and accomplish resource saving, and a packing material therefor, wherein a packing material 102, which wraps an object 101 to be carried in a clean room 130 which is a clean atmosphere, is composed of a material of low dust evolution and capable of being cleaned, wherein the packing material 102 can be used a plurality of times by cleaning.
    Type: Grant
    Filed: January 29, 1999
    Date of Patent: March 5, 2002
    Assignee: Tokyo Electron Limited
    Inventor: Satosi Isido
  • A METHOD OF PACKING A SEMICONDUCTOR MANUFACTURING APPARATUS TO BE CARRIED INTO A CLEAN ROOM
    Publication number: 20010015053
    Abstract: A packing method of an object to be carried in a clean room that can reduce remarkably the amount of evolution of waste and accomplish resource saving, and a packing material therefor, wherein a packing material 102, which wraps an object 101 to be carried in a clean room 130 which is a clean atmosphere, is composed of a material of low dust evolution and capable of being cleaned, wherein the packing material 102 can be used a plurality of times by cleaning.
    Type: Application
    Filed: January 29, 1999
    Publication date: August 23, 2001
    Applicant: TOKYO ELECTRON LIMITED
    Inventor: SATOSI ISIDO