Patents by Inventor Satya Venkata Nitta

Satya Venkata Nitta has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method to generate airgaps with a template first scheme and a self aligned blockout mask
    Patent number: 7863150
    Abstract: A structure and method to produce an airgap on a substrate having a dielectric layer with a pattern transferred onto the dielectric layer and a self aligned block out mask transferred on the dielectric layer around the pattern.
    Type: Grant
    Filed: September 11, 2006
    Date of Patent: January 4, 2011
    Assignee: International Business Machines Corporation
    Inventors: Matthew Earl Colburn, Daniel C. Edelstein, Satya Venkata Nitta, Sampath Purushothaman, Shom Ponth