Abstract: A semiconductor device includes first and second gate structures, a metallization layer, and first and second tie-off contacts. The first and second gate structures extend substantially along a first direction and are aligned with each other substantially along the first direction. The metallization layer includes a Vdd line, a Vss line, metal lines between the Vdd line and the Vss line and extending substantially along a second direction different from the first direction. The first tie-off contact overlaps an intersection of the first gate structure and a first one of the Vdd line and the Vss line from a top view. The second tie-off contact overlaps an intersection of the second gate structure and a first one of the metal lines from the top view, wherein said first one of the metal lines is adjacent to a second one of the Vdd line and the Vss line.